Boe Technology Group Co., Ltd.

Chengdu Boe Optoelectronics Technology Co., Ltd.

Dongkoog Jang

Xiaodan Wei

Zhong Lu

Xiaofeng Yang

Shuibin Ni

Xingqiang Zhang

A method for fabricating an array substrate, an array substrate and a display device are provided. The method for fabricating the array substrate includes: forming a spacer layer on the array substrate, the spacer layer is disposed under a planarized layer and corresponds to a location of a via hole in the planarized layer, wherein the planarized layer is formed of a hot melt material.

Method for fabricating array substrate, array substrate and display device

The method for manufacturing the TFT includes: forming a semiconductor film, a doped semiconductor film, a source/drain electrode film, and a first patterned photoresist layer sequentially; performing first etching to remove the source/drain electrode film on a region that is not covered by the first patterned photoresist layer; performing second etching to remove the doped semiconductor film and the semiconductor film on a region that is not covered by the first patterned photoresist layer; performing ashing treatment on the photoresist layer to remove the photoresist layer on the channel region; hard-baking the photoresist layer after the ashing treatment; performing third etching to remove the source/drain electrode film on a region that is not covered by the photoresist layer; and performing fourth etching to remove the doped semiconductor film on the region that is not covered by the photoresist layer.

Method for system for manufacturing TFT, TFT, and array substrate

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Dongkoog Jang