Intel Corporation

Massachusetts Institute of Technology

Donghwan Ahn

Lionel Cooper Kimerling

Jurgen Michel

Kazumi Wada

Jun-Fei Zheng

Jifeng Liu

An optical grating is disposed on a waveguide to redirect light from the interior of the waveguide through the opposite side of the waveguide from the grating. In one embodiment the waveguide, the grating, and an optical sensor are combined in a single monolithic structure. In another embodiment, an absorbing layer is directly connected to the waveguide in the region of the grating. In still another embodiment, efficiency of the grating is improved by having a high index contrast between the refractive index of the grating and the refractive index of the cladding disposed over the grating, and by having an appropriately sized discontinuity in the grating.

Optical grating coupler

High-speed optoelectronic devices having a waveguide densely integrated with and efficiently coupled to a photodetector are fabricated utilizing methods generally compatible with CMOS processing techniques. In various implementations, the waveguide consists essentially of single-crystal silicon and the photodetector contains, or consists essentially of, epitaxially grown germanium or a silicon-germanium alloy having a germanium concentration exceeding about 90%.

Vertically-integrated waveguide photodetector apparatus and related coupling methods

Integrated waveguide photodetector apparatus with matching propagation constants and related coupling methods

Growing community of inventors

Dorchester, MA, United States of America

Donghwan Ahn