Samsung Electronics Co., Ltd.

Dong Sik Shim

Dong Jae Shin

Kyoung Ho Ha

Seong Gu Kim

Yong Hwack Shin

Chang Gyun Shin

Jung Ho Cha

Moon Chul Lee

Chang Bae Lee

Byung Ha Park

Sung Joon Park

Kyong Il Kim

Il Woo Kim

Chang Bum Lee

An optical beam steering device may include a tunable laser diode configured to emit laser beams and an antenna that includes a grating structure and is configured to convert the laser beams to a linear light source based on the grating structure. The tunable laser diode may emit a first laser beam having a first wavelength, and emit a second laser beam having a second wavelength, the second wavelength different from the first wavelength. The antenna may receive the first laser beam and, in response, output a first linear light source having a first emission angle with a surface of the antenna. The antenna may further receive the second laser beam and, in response, output a second linear light source having a second emission angle with the surface of the antenna, the second emission angle different from the first angle.

Optical beam steering devices and sensor systems including the same

A MEMS (Micro Electro Mechanical System) device and a method of manufacturing the same, in which an detection indicator is formed on a chamber layer stacked on a substrate such that a user easily inspects whether the chamber layer has a required thickness. The MEMS device can include two detection indicators that are formed on the chamber layer and have different depth from each other, or an detection indicator which is formed on the chamber layer and has a tapered sectional shape in which an upper surface of the detection indicator is gradually narrowed in a downward direction such that a user can easily inspect whether the chamber layer has a required thickness. The user can precisely determine whether the chamber layer is planarized to a required thickness by planarizing the detection indicator formed on the chamber layer, and inspecting the detection indicator by using an optical microscope, thereby facilitating inspection for a thickness of the chamber layer.

Micro electro mechanical system device and method of manufacturing the same

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Suwon-si, South Korea

Dong Sik Shim