Globalfoundries Singapore Pte. Ltd.

Dong Qing Zhang

Yun Tang

Shyue Fong Quek

Gek Soon Chua

Yee Mei Foong

Qing Yang

An approach for methodology, and an associated apparatus, enabling a simulation process to check integrity of the design and predict a manufacturability of a resulting circuit that accounts for process latitude without a long turnaround time and/or a highly skilled engineer is disclosed. Embodiments include: determining first and second features of an IC design; determining a thickness of a resist layer of the IC design based on an aerial image of the IC design; determining a threshold value according to the thickness; and comparing the threshold value to a separation distance between the first and second features.

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Ballston Spa, NY, United States of America

Dong Qing Zhang