Samsung Electronics Co., Ltd.

Global Standard Technology Co., Ltd.

Dong Keun Jeon

Sung Chul Yoon

Jongyong Bae

Suji Gim

Young Seok Roh

Heesub Kim

Hee Ock Park

Sunsoo Lee

Jinkyoung Joo

Ki Yong Lee

Gyu Dong Moon

Duk Jun Kim

Hyun Uk Sin

Sang Joon Park

A scrubber system may include a scrubber housing including a vertically extended cleaning space, an inflow chamber coupled to a bottom portion of the scrubber housing, and first and second inflow portions, each of which is configured to supply a gas into the inflow chamber. The inflow chamber may include a mixing space, and the mixing space may be connected to the cleaning space. The first inflow portion may include a first connection pipe coupled to the inflow chamber to provide a first connection path and the second inflow portion may include a second connection pipe coupled to the inflow chamber to provide a second connection path. The first and second connection paths may be extended toward the mixing space in opposite directions, respectively, and may be connected to opposite portions of the mixing space, respectively.

Scrubber system and wet cleaning method using the same

An apparatus for purifying waste gases for an integrated semiconductor is provided, which includes a cover including a burner mounted thereon to generate a flame and a plurality of waste gas inlet pipes formed on a circumference of the burner to make waste gases flow therethrough; a reactor including upper and lower openings formed thereon so that the cover is detachably coupled to the upper opening, a converging member tapered to have a smaller diameter as going toward a lower portion thereof, and a transport pipe vertically arranged to communicate with an apex of the converging member, in which a water curtain is formed to prevent accumulation of by-products, to burn and discharge the inflow waste gases; and a cleaning portion integrally formed in the reactor to water-clean the burnt waste gases that are discharged into the reactor after passing through the transport pipe to collect particles. Since the burner, the reactor, and the scrubber are integrally formed in a body.

Apparatus for purifying waste gases for integrated semiconductor

Growing community of inventors

Hwaseong-si, South Korea

Dong Keun Jeon