Other

Snu Rdb Foundation

Chromux Technologies, Inc.

Seoul National University

Samsung Electronics Co., Ltd.

Princeton University

New Jersey Institute of Technology

Techbank Corporation

Ic Mems, Inc.

Dong-il Cho

Sangjun Park

Sangwoo Lee

Jaehong Park

Jung Min Lim

Ah Ra Lee

Seung Joon Paik

Sangmin Lee

Sang Min Lee

Hyungjin Kim

Jae Hyun Ahn

William Ned Carr

JongPal Kim

Sangchul Lee

Geun-Bae Lim

Young-Sun Lee

Sung-wook Kim

Dong-Hoon Yi

Tallis Y Chang

Dae-sung Yoon

Seok Jun Hong

Hyoung Jung Yoo

Kyo-In Koo

Sang Won Byun

Sun Kil Park

Myoung Jun Jeong

Hyun Min Choi

Jae-in Ko

Hyoungho Ko

A system of controlling a vision device based on motion commands may include: a movable body; a vision device driven by being connected to the body and receiving image information; a driving unit driving the body in accordance with a motion command; and a control unit which calculates motion information of the body using the motion command and drives the vision device so as to compensate an influence caused by the motion of the body using the calculated motion information. By using the system, reliable image information may be obtained in a manner such that a vision device included in a subject such as a locomobile robot is controlled to watch a predetermined target even when the subject moves.

System and method of controlling vision device for tracking target based on motion commands

One aspect of the present invention relates to a drug delivery system comprising a layered structure where a drug layer and a biodegradable polymer layer for controlling the release of drugs are alternately laminated. The drug delivery system can easily control an in-vivo drug release rate and a release amount.

Drug delivery system including laminated structure

A system and a method for stabilization control may control position and direction of an object having first and second bodies connected to each other. The system may include an artificial vestibular apparatus for outputting a movement signal corresponding to movement of the first body and a rotation signal corresponding to rotation of the first body; a translating actuation unit connected between the first and second bodies and controlling position of the second body in response to the movement signal; and a rotating actuation unit connected between the first and second bodies and controlling rotation of the second body in response to the rotation signal. If the system and the method are applied to a vision system of a mobile robot, the vision system may obtain stabile image information even when the mobile robot is moving. Thus, it is possible to prevent any blurring from occurring at the image information.

System and method for stabilization control adopting vestibulo-ocular reflex

Disclosed are a barb-wired single crystalline silicon micro needle and a biopsy method and a medicine injecting method using the same. The micro needle comprises a main body part, at least one extension part formed on a side surface of the main body part, and a protrusion part protruded from both side surfaces of the extension part. A medicine storage is formed on a surface of the main body part. A fluid passage is formed in the extension part and the main body part. It is easy to pick the tissue sample with the protrusion part just by inserting and extracting the extension part of the micro needle into and from the tissue for a biopsy. Therefore, the biopsy procedures can be simplified. In addition, the medicine in the storage can be injected into the tissue via the fluid passage.

Barb-wired micro needle made of single crystalline silicon and biopsy method and medicine injecting method using the same

Disclosed is a catheter used to pick a sample of a lesion cell tissue existing in the living body, and more particularly a catheter capable of freely coupling or separating a micro biopsy tool and picking a tissue required for an examination just by inserting and extracting the biopsy tool into and from a lesion region when picking the tissue. The catheter can pick a tissue required to diagnose and treat an examinee with a minimal invasion. Accordingly, it is possible to alleviate the examinee's pain and to prevent a perforation from occurring in the picked region when picking the tissue. In addition, according to the catheter of the invention, since the micro biopsy tool can be easily mounted and separated, the catheter can be semi-permanently used by continuously replacing the biopsy tool only.

Catheter capable of being equipped with micro biopsy tool

Provided are a temperature control method and apparatus for driving a polymerize chain reaction (PCR) chip. In the temperature control apparatus, which is for a polymerize chain reaction chip, PCR chips receive electric power from the outside and generating heat to maintain a predetermined temperature and for outputting actual temperature information to the outside. electric power supply units supply electric power to the PCR chips according to input control signals, and a controller generates the control signals based on control information including pre-established control temperature and control time information and the actual temperature information supplied from the PCR chips in order to supply the control signals to the electric power supply units. In the present invention, it is possible to examine various kinds of DNA at the same time because the temperature control apparatus controls the temperatures of DNA samples at the same time.

Temperature control method and apparatus for driving polymerase chain reaction (PCR) chip

A micromachined single-crystalline silicon micro-gyroscope comprising oxide/polysilicon/metal triple layer for electrical isolation is disclosed. The isolation method includes forming the triple layer composed of an insulation layer formed over an exposed surface of the silicon microstructure, a conductive layer formed over the entire insulation layer, and a metal layer formed over a top portion of the microstructure; and etching the conductive layer at the bottom to form electrical isolation between parts of the microstructure. The method does not require a separate photolithography process for isolation, and can be effectively applied to microstructures having high aspect ratios and narrow trenches.

Surface/bulk micromachined single-crystalline silicon micro-gyroscope

The silicon etching apparatus using XeF includes: a basic structure composed of a loading chamber tot loading XeF , an expansion chamber for collecting sublimated XeF gas, and an etching chamber for performing an etching process; and a means for injecting nitrogen prior to the etching process to eliminate air moisture in the apparatus and thus preventing the formation of HF. The silicon etching apparatus using XeF further includes: an injector having a predefined shape provided in the etching chamber for uniformly injecting the XeF gas downward on to surface of a wafer; a feedback controller for feedback controlling the internal pressure of the loading chamber in order to prevent sublimation of the residual XeF in the loading chamber; and a weight scale for measuring the weight of XeF in the loading chamber.

Silicon etching apparatus using XeF2

Disclosed are a probe structure for testing semiconductor devices and a method for fabricating the probe structure. The fabricated probe structure of the present invention satisfies the high density, the uniformity of size, height and spacing, and the integration of elements. The probe structure of the present invention solves the conventional problems such as long fabrication time of the probe structure, difficulty in finely controlling the structure of the probe structure, complexity of the whole process, mechanical instability of the products, and difficulty in uniformly assembling a plurality of the probe structures. Additionally, the probe structure of the present invention solves several problems caused in an actual testing step of the semiconductor devices, for instance, long testing time of the semiconductor device, difficulty in providing the sufficient contact force between the probe structure and the semiconductor device, and having to specially design the test pads of the semiconductor device.

Probe structure for testing semiconductor devices and method for fabricating the same

The present invention, by improving the silicon surface/bulk micromachining technology using two steps of silicon etch mask patterning and four steps of silicon etching, fabricates a structure which has vertically offset electrodes and consequently fabricates an electrostatic vertical and torsional actuator using one single-crystalline silicon wafer. According to the method of the present invention, the problems of the prior art that used a number of silicon wafers and single/double SOI wafers, or combining of these wafers with additional deposited poly-crystalline silicon films, may be resolved.

Method of fabricating an electrostatic vertical and torsional actuator using one single-crystalline silicon wafer

Disclosed is a micromechanical system fabrication method using (111) single crystalline silicon as a silicon substrate and employing a reactive ion etching process in order to pattern a microstructure that will be separated from the silicon substrate and a selective release-etching process utilizing an aqueous alkaline solution in order to separate the microstructure from the silicon substrate. According to the micromechanical system fabrication method of the present invention, the side surfaces of microstructures can be formed to be vertical by employing the RIE technique. Furthermore, the microstructures can be readily separated from the silicon substrate by employing the selective release-etching technique using slow etching &lcub;111&rcub; planes as the etch stop in an aqueous alkaline solution. In addition, etched depths can be adjusted during the RIE step, thereby adjusting the thickness of the microstructure and the spacing between the microstructure and the silicon substrate.

Micromechanical system fabrication method using (111) single crystalline silicon

An isolation method for a single crystalline silicon microstructure using a triple layer structure is disclosed. The method includes forming the triple layer composed of an insulation layer formed over an exposed surface of the silicon microstructure, a conductive layer formed over the entire insulation layer, and a metal layer formed over a top portion of the microstructure; and partially etching the conductive layer to form electrical isolation between parts of the microstructure. The method does not require a separate photolithography process for isolation, and can be effectively applied to microstructures having high aspect ratios and narrow trenches. Also disclosed are single crystalline silicon microstructures having a triple layer isolation structure formed using the disclosed method.

Triple layer isolation for silicon microstructure and structures formed using the same

An optical ON/OFF switch includes a micro-mechanical shutter formed on a silicon substrate using micro-mechanical fabrication techniques. The switch selectively opens and closes an optical path between two fibers with the micro-mechanical shutter. A micro-mechanical latch latches the shutter open or closed and remains in this state until electrical signals disengage the latch. Incoming and outgoing fibers are coupled to the shutter within the switch so that, when the shutter and the switch are ON (open) light couples between the ends of the two fibers. The fibers are positioned within stepped channels that hold each fiber along two edges within the channels so that the fibers are held in fixed alignment and relation. The fibers are laterally offset with respect to each other and the faces of the fibers are angled to limit back reflections from the shutter while still obtaining good coupling between the fibers.

Micro-machined silicon on-off fiber optic switching system

An electrical isolation method for silicon microelectromechanical systems provides trenches filled with insulation layers that support released silicon structures. The insulation layer that fills the trenches passes through the middle portion of the electrodes, anchors the electrodes to the silicon substrate and supports the electrode. The insulation layers do not attach the electrode to the sidewalls of the substrate, thereby forming an electrode having an &ldquo;island&rdquo; shape. Such an electrode is spaced far apart from the adjacent walls of the silicon substrate providing a small parasitic capacitance for the resulting structure. The isolation method is consistent with fabricating a complex structure or a structure with a complicated electrode arrangement. Furthermore, the structure and the electrode are separated from the silicon substrate in a single release step. Additionally, a metal layer is deposited on the surfaces of the structure and electrodes without using separate photolithography and etching steps.

Isolation in micromachined single crystal silicon using deep trench insulation

A vehicle detector comprising a loop sensor, phase lock loop (PLL), frequency change detector, and a micro-processor including a logic circuit. Output of the PLL and the frequency change detector is inputted to the logic circuit, and the logic circuit performs logical OR operation of the output of the PLL and the output of the frequency change detector. The output of the logic circuit is used as a vehicle detection signal. The vehicle detector can detect vehicles at a low speed as well as vehicle at high speed accurately.

Growing community of inventors

Seoul, South Korea

Dong-il Cho