Samsung Electronics Co., Ltd.

Dong-Gu Kim

Junghyeon Kim

Oleg Feygenson

Young-Chul Lee

Homin Son

Eunha Oh

Donghyun Jang

Sung-Woo Jeon

Jeong-Tae Choi

Wooyeon Hwang

Woon-Sik Kim

Hangkyu Song

An apparatus for depositing a thin layer and associated method, the apparatus including a process chamber; a support in the process chamber, substrates being supportable on the support at different heights; a gas injector configured to inject a gas into the process chamber; and a heater configured to heat the process chamber, wherein the gas injector includes a first injector configured to inject a first gas; and a second injector configured to inject a second gas, a flow rate of the first gas injected from the first injector ranges from 120 sccm to 240 sccm, and a flow rate of the second gas injected from the second injector ranges from 1,200 sccm to 2,400 sccm.

Apparatus and method of depositing a thin layer

An insert module for a test handler includes an insert body and a support frame. The insert body has a receiving space for receiving a semiconductor device. The semiconductor device having connection pads protruding externally from a surface of the semiconductor device. The support frame is formed in an inner side portion of the insert body defining the receiving space to provide a seating surface for contacting and supporting the semiconductor device. The support frame includes a fixing frame and a guide pattern. The fixing frame is inserted into and fixed with the insert body and defines an opening that exposes the semiconductor device. The guide pattern extends from the fixing frame to the inside of the opening to contact the semiconductor device and guide the connection pads.

Insert module for a test handler

Growing community of inventors

Cheonan-si, South Korea

Dong-Gu Kim