Korea Kumho Petrochemical Co., Ltd.

Korea Kumho Petrochenicals Co., Ltd.

Dong-Cheol Seo

Jung-Hoon Oh

Chang-Soo Lee

Hyun-Sang Joo

Jin-Bong Shin

An acid generating agent used for chemically amplified resist compositions is provided, which agent is represented by the following formula (1): 

Acid generating agent for chemically amplified resist compositions

An acid generator represented by the following formula (1) is provided: wherein X represents an alkylene group having 1 to 10 carbon atoms, &#x2014;X&#x2014;O&#x2014;X&#x2014;, or a heteroatom selected from the group consisting of nitrogen, sulfur and fluorine; Xand Xeach independently represent an alkylene group having 1 to 10 carbon atoms; Y represents a cyclic hydrocarbon group having 5 to 30 carbon atoms and containing one or more aromatic rings, while one or more hydrogen atoms on the ring of the cyclic hydrocarbon group may be substituted by one or more members selected from the group consisting of &#x2014;O&#x2014;Y, &#x2014;CO&#x2014;Y, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a perfluoroalkyl group having 1 to 4 carbon atoms, a perfluoroalkoxy group having 1 to 4 carbon atoms, a hydroxyalkyl group having 1 to 6 carbon atoms, a halogen atom, a hydroxyl group and a cyano group; Yand Yeach independently represent an alkyl group having 1 to 6 carbon atoms; n represents an integer of 0 or 5; and Arepresents an organic counterion.

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Chungcheongnam-do, South Korea

Dong-Cheol Seo