Spectrum Control, Inc.

Donald S Strycker

Angelo Yializis

David G Shaw

Mooyoung Ham

A monolithic multi-layer capacitor having a central capacitively active area and two electrode joining section separated from the active area by sloped sections has dielectric layers about 1 micron thick in the active area which taper gradually to zero thickness in the sloped sections. Electrode layers in the active area have a thickness in the range from 200 to 500 Angstroms and sufficient thickness throughout the sloped sections for adequate current carrying capacity. Various acrylates are used for the dielectric layers, the number of layers ranging from a few to many thousands. Apparatus and methods for the fabrication of such capacitors on a high speed, production scale basis employ techniques for the flash evaporation of highly reactive monomers of acrylate dielectric materials. The vapor is controllably directed to a deposition surface for condensation and subsequent curing by a field enhanced gas discharge electron beam source. The control of the dielectric vapor is accomplished by adjacent gas streams of an inert gas directed to areas of the deposition surface where deposition of the electrode material is unwanted. Monomers of the dielectric material are ultrasonically atomized in preparation for flash evaporation.

Miniaturized monolithic multi-layer capacitor and apparatus and method

A high speed apparatus for forming capacitors includes a vacuum chamber in which is located a carrier defining a continuous surface configured to move at a rate of from about 150 feet per minute to about 600 feet per minute during the forming operation, a metal depositing device, a dielectric depositing device, and a radiation source. The metal depositing device is configured to deposit layers of metal onto the moving surface, and the dielectric depositing device includes (a) a device for atomizing a radiation-curable polyfunctional acrylic monomer to form liquid droplets of the monomer, (b) a heated surface on which the atomized monomer droplets impinge and are flash vaporized, and (c) device for thereafter condensing the flash-vaporized monomer on the metal layers to form a monomer coating on successive layers. The radiation source is positioned for curing successive monomer coatings after each such coating has been deposited, to thereby form a polymer dielectric layer. Apparatus are provided for controlling each of the devices so that metal is deposited, a monomer coating is deposited, and the monomer coating is cured to form the polymer dielectric layer before the continuous surface passes the devices again for successive metal layers, monomer coatings, and curings.

High speed apparatus for forming capacitors

A high speed process for forming a multi layered thin film structure in a vacuum wherein each film is less than about four microns thick and the total layers can reach upwards to 4,000 or more. The polymeric layers are formed of a cross linked component selected from the group consisting of polyfunctional acrylates and mixtures of polyfunctional acrylates and monocrylates with the component having a preferable molecular weight of between 200 and 300 and a vapor pressure preferably in excess of 1.times.10.sup.-2 Torr. The polymeric layers may be interleaved with metal layers.

Method of making a multi-layered article

A monolithic multi-layer capacitor is disclosed having a central capacitively active area and two electrode joining sections separated from the active area by sloped sections. The dielectric layers are about 1 micron thick in the active area and taper gradually to zero thickness in the sloped sections. Electrode layers in the active area have a thickness in the range from 200 to 500 Angstroms and sufficient thickness throughout the sloped sections for adequate current carrying capacity. Various acrylates are used for the dielectric layers, the number of layers ranging from a few to many thousands. Apparatus and methods are disclosed for the fabrication of such capacitors on a high speed, production scale basis. Such employ techniques for the flash evaporation of highly reactive monomers of acrylate dielectric materials so as to form a gaseous stream of such materials. The gas stream is controllably directed to a deposition surface for condensation and subsequent curing by a field enhanced gas discharge electron beam source. The control of the dielectric gas stream is accomplished by means of adjacent gas streams of an inert gas directed to areas of the deposition surface where deposition of the electrode material is unwanted. Means are disclosed for the atomization of the monomers of the dielectric material in preparation for its flash evaporation.

A high-speed process for coating substrates with thin organic coatings in a vacuum is disclosed and claimed. The process utilizes relatively low boiling, reactive monomers (e.g., polyacrylates) which are flash vaporized, condensed on the substrates and cured, in situ. The resultant cured films are pin-hole free and exhibit excellent adhesion. The process is capable of being run at very high coating and curing speeds, e.g., between 1 and 1000 cm/second.

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Glens Falls, NY, United States of America

Donald S Strycker