National Semiconductor Corporation

Asml Holding N.v.

Silicon Valley Group, Inc.

Donald R Sauer

Robert Parkash Mandal

James C Grambow

Ted C Bettes

Emir Gurer

Edmond R Ward

Tom Zhong

John W Lewellen

Edward C Lee

Ed C Lee

Jung-Hoon Chun

Sangjun Han

Gurer Emir

Ted C Dettes

Emir Guegrer

A method of and an apparatus for coating a substrate with a polymer solution to produce a film of uniform thickness, includes mounting the substrate inside an enclosed housing and passing a control gas, which may be a solvent vapor-bearing gas into the housing through an inlet. The polymer solution is deposited onto the surface of the substrate in the housing and the substrate is then spun. The control gas and any solvent vapor and particulate contaminants suspended in the control gas are exhausted from the housing through an outlet and the solvent vapor concentration is controlled by controlling the temperature of the housing and the solvent from which the solvent vapor-bearing gas is produced. Instead the concentration can be controlled by mixing gases having different solvent concentrations. The humidity of the gas may also be controlled.

Method of uniformly coating a substrate

A dual regeneration bandgap voltage generator circuit includes both CMOS and bipolar regeneration bandgap voltage generator circuits. Each of the regeneration bandgap voltage generator circuits is formed by cross-coupling current mirror circuits of opposite conductivity types. Upon initial application of power, the CMOS circuit becomes active first due to its higher leakage current. The 'on' current from the CMOS circuit is then used to initiate current conduction within the bipolar circuit. Once the bipolar circuit begins operating, it turns the CMOS circuit off.

Dual regeneration bandgap reference voltage generator

An interface stage for interfacing between input and output stages of a rail to rail comparator. The interface stage combines and amplifies four input stage output currents from the input stage, including by common base feeding them to a symmetrical set of virtual grounds, to generate a differential output signal for driving the output stage. In preferred embodiments, the interface stage includes two sets of bipolar transistors, each set connected in a common base configuration, which amplify each input stage output current and assert the resulting amplified signals to a pair of symmetrical virtual ground circuits. Each virtual ground circuit comprises a bipolar transistor and is configured to combine two of the amplified signals to generate one component of the differential output signal. By employing the virtual ground circuits, the slew rate of the interface stage is principally determined by its input transconductance and the collector-to-base stray capacitance of the bipolar transistors of the virtual ground circuits. Thus, since the virtual ground circuits can be implemented with minimum geometry bipolar transistors having very low collector-to-base stray capacitance, the interface stage can be implemented to have very high slew rate. In other embodiments, the invention comprises a rail to rail comparator input stage (having an autozero switch) coupled with an interface stage including autozero circuitry. The autozero circuitry and the autozero switch can be controlled to execute an autozero operation in which DC noise due to offset in the output signal (of the combined input and interface stage) is rapidly attenuated by means of a negative feedback loop.

Input to output stage interface with virtual ground circuitry for rail

A method of and an apparatus for coating a substrate with a polymer solution to produce a film of uniform thickness, includes mounting the substrate inside an enclosed housing and passing a control gas, which may be a solvent vapor-bearing gas into the housing through an inlet. The polymer solution is deposited onto the surface of the substrate in the housing and the substrate is then spun. The control gas and any solvent vapour and particulate contaminants suspended in the control gas are exhausted from the housing through an outlet and the solvent vapor concentration is controlled by controlling the temperature of the housing and the solvent from which the solvent vapor-bearing gas is produced. Instead the concentration can be controlled by mixing gases having different solvent concentrations. The humidity of the gas may also be controlled.

Apparatus for uniformly coating a substrate

The invention described herein is essentially a single ended power amplifier circuit properly biased to avoid crossover distortion and comprising in its output stage an NPN power transistor connected between a positive voltage source and a load. The base of the NPN transistor is connected to the collector of a PNP power transistor whose emitter is also connected to the positive voltage source. The parallel NPN/PNP transistor composite arrangement is a major feature in the power amplifier circuit resulting in a reasonably low quiescent current, low distortion, inherent stability, and ease in biasing. The composite combination of the PNP/NPN output transistors are driven by a single high Beta NPN input transistor driving the base of the PNP output transistor through a diode connected PNP transistor with unity current gain. The PNP output transistor drives the base terminal of the NPN output transistor. An alternate embodiment is disclosed which utilizes two overload protective transistors.

High efficiency power amplifier circuit

Growing community of inventors

San Jose, CA, United States of America

Donald R Sauer