Advanced Semiconductor Materials America, Inc.

Lad Technology, Inc.

Economic Development Corporation

Donald M Olson

Norman L Jackson

Jerry E Tong

A wafer pick up device is presented which may be used to pick up silicon wafers used in the semiconductor industry during the various stages of processing. Since the pick up device is made out of a high temperature and acid resistant material, it may be used to pick up hot wafers or to handle wafers being subjected to an acid bath. The device uses a sliding plate which slidably engages a closure channel and base plate. Two wafer holding pins fastened to an actuator bar portion of the sliding plate are used to engage a portion of the outer periphery of a wafer. A curved V-shaped groove at one end of the base plate engages another portion of the outer periphery of the wafer. The distance between the waver holding pins and curved V-shaped groove can be adjusted so that the wafer may be picked up by engaging the primary flat surface at the outer periphery of the wafer if desired. The actuator bar portion is wide enough to provide structural rigidity and facilitate holding the wafer securely in place. An operator may grasp extensions located on top of the device in order to move the sliding plate forward.

High temperature and acid resistant wafer pick up device

Improved conductive elements for direct exposure to reactive ambients. The conductive articles are fabricated from bodies of alpha silicon carbide comprising a minor fraction of homogeneously dispersed conductive particles. The bodies may have a sufficiently low electrical resistivity so that they may be used as heaters for direct contact with workpieces at high temperatures.

Stable conductive elements for direct exposure to reactive environments

A heat activated dispenser is disclosed which is suitable for dispensing into the ambient a variety of materials including medicaments, insect repellants, odor maskants, and the like. The dispenser is formed from compacted diatomite shaped to fit around and receive heat from a heat source such as a light bulb. The diatomite is charged with a vaporizable material which is released into the ambient in a gaseous state when heat is applied to the dispenser. A method of dispensing a vapor into an ambient comprising providing a volume of material having a vaporizable material therein and applying heat thereby causing said vaporizable material to be dispensed into the ambient atmosphere.

Heat activated dispenser and method of dispensing a vapor therefrom

An article handling device which is particularly well suited for loading articles into a reactor furnace for processing and subsequently unloading the processed articles. The article handling device is supported and vertically movable into alignment with the reactor furnace and includes an article moving device which is reciprocally vertically elevatable and reciprocally horizontally extensible for loading the articles into the reactor furnace and subsequent unloading thereof with minimal disturbing of the reactor process residue which is inherently deposited in the interior of the reactor furnace.

Growing community of inventors

Scottsdale, AZ, United States of America

Donald M Olson