Smart Machines

Brooks Automation Gmbh

Donald J Thomas

Todd R Solomon

Gerard J Labonville

Robert Roy

Michael Risi

Martin Peter Aalund

A robot with a base, a first link connected to the base by a shoulder joint, and a second link connected to the first link by an elbow joint. A shoulder motor drives the shoulder joint, and an elbow motor drives the elbow joint. An upper elbow pulley is coupled to the first link. An end effector pulley coupled to the upper elbow pulley, and a dual-bladed end effector driven by the end effector pulley. The diameter of the upper elbow pulley and the diameter of the end effector pulley are related by a 1:2 ratio. Ferro-fluid seals are used to seal each joint. A static seal joins the seams of the links. Each arm link has a particle filter. The robot can communicate electrical signals through the revolute joints with a conductive slip-ring assembly. Alternately, the joint may have an inner cylinder and an outer cylinder, and a cable may be coiled between the cylinders.

Direct driven robot

An apparatus for centering and gripping semiconductor wafers. A solenoid is used to actuate two or three curved contacts. Power to the solenoid, and position information from the solenoid is transmitted along a pair of wires. To center the wafer, the solenoid is actuated and the contacts move radially towards the center of the wafer. The contacts grip the edge of the wafer and a pulse-width-modulation signal is used to determine solenoid position as a function of back electromotive force value or waveform. During handling, the contacts hold the wafer such that the wafer does not move relative to the apparatus.

Apparatus and method for high-speed transfer and centering of wafer

Drive system for a robotic arm

A robotic arm has a base with a top surface and an aperture therein. A shaft extends up through the aperture, and there is a gap between the shaft and an inner edge of the aperture. A splash guard may extend over said gap, and an indentation in said top surface may at least partially surround the gap. A seal, including a bearing and a barrier, is located in the gap. The bearing allows the inner and outer surfaces to rotate relative to each other. The barrier includes a plurality of annular outward-pointing flanges attached to an inner surface interleaved with a plurality of annular inward-pointing flanges attached to an outer surface. The flanges may be angled and have an upturned lip located at an inner edge of each flange. The seal may include a magnet attached to a flange.

Robotic arm having a splash guard

A rotary seal is located in a gap between an inner surface and an outer surface. A radial bearing allows the inner and outer surfaces to rotate relative to each other. A radial barrier includes a plurality of annular outward-pointing flanges attached to the inner surface interleaved with a plurality of annular inward-pointing flanges attached to the outer surface. The flanges may be angled and have an upturned lip located at an inner edge of each flange. The radial seal may include a magnet. A robotic arm has a first housing with a top surface and an aperture therein. A shaft extends up through the aperture, and there is a gap between the shaft and an inner edge of the aperture. A splash guard may extend over said gap, and an indentation in said top surface may at least partially surround the gap.

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San Jose, CA, United States of America

Donald J Thomas