Thomas West, Inc.

Donald Dietz

Thomas E West

Long Van Nguyen

Kevin H Song

Guangwei Wu

Peter McKeever

Matt Richardson

A method for making a polishing pad includes rotating a cylinder about a central axis. The cylinder encloses in an interior space a polymer mixture. The method also includes forming the polishing pad from at least some of a polymer formed after the polymer mixture has gelled. The rotating of the cylinder may be continued until the polymer has cured. The method may include forming at least two distinct layers in the polishing pad by casting and gelling sequentially at least two different polymer mixtures. A system for manufacturing a polishing pad includes a centrifugal caster adapted to rotate. A polishing pad made by a method is provided.

Methods and systems for centrifugal casting of polymer polish pads and polishing pads made by the methods

Pads and methods of making the pads for applications such as polishing substrates and chemical mechanical planarization of substrates are provided. The pads include a substantially smooth surface for improved performance.

Smooth pads for CMP and polishing substrates

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Mountain View, CA, United States of America

Donald Dietz