Kla Tencor Corporation

Donald D Walker

Harish P Hiriyannaiah

A method for determining a peak value of a histogram or a sequence of sampled data is disclosed. The method may include fitting a curve to the sequence of data, the curve being modeled based on an orthonormal expansion; obtaining a differential curve, the differential curve describing changes in slope of the curve fitted to the sequence of data; finding at least one root for the differential curve; for each of the at least one root for the differential curve, calculating a corresponding value on the curve fitted to the sequence of data; and determining the peak value of the sequence of data based on a maximum value among the corresponding value calculated for each of the at least one root.

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San Jose, CA, United States of America

Donald D Walker