Macronetics, Inc.

Don O Rawlings

Paul Franklyn Key

Robert I Beaver, Ii

George L Prodanovich

Michael J Adams

P Santhanam

Susan L Hunt

Buffer storage apparatus is disclosed for use with a semiconductor wafer processing system having plurality of processing stations positioned along a conveyor structure and in which allowance must be made for different processing rates at different stations, the buffer storage apparatus including a first buffer storage station positioned between a first and a second processing station for temporarily holding wafers received from the first processing station and then conveying them to the second processing station, and a second buffer station positioned between the second processing station and the third processing station and including means for conveying a wafer received from the second processing station to the third processing station or for temporarily holding it.

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San Jose, CA, United States of America

Don O Rawlings