Wacker Chemie Ag

Dominik Rennschmid

Heinz Kraus

Christian Kutza

Improved sealing of Siemens reactor electrodes which results in improved reactor campaign times, is accomplished by use of an electrically insulating ring in combination with two seals, a first seal located in a groove in the insulating ring or in a groove in the reactor base plate adjacent the insulating ring, and a second seal not contained in a groove.

Device for insulating and sealing electrode holders in CVD reactors

Siemens CVD reactors are sealed in a manner which facilitates long production campaigns without refurbishing the seals, by the use of at least two seals, and an electrically insulating member having a thermal conductivity of from 1 to 200 W/mK, a sustained use temperature of at least 400&#xb0; C., and a resistivity of more than 1&#xb7;10&#x3a9;cm.

Growing community of inventors

Burghausen, Germany

Dominik Rennschmid