Robert Boschgmbh

Trumpf Photonic Components Gmbh

Dominik Moser

Alexander Marc Van Der Lee

Robert Wolf

Hans Spruit

Stefan Weiss

Alexander Herrmann

Balazs Jatekos

Robert Weiss

Matthias Falk

Sören Sofke

Jens-Alrik Adrian

Wolfram Johannes Martin Lyda

A system for determining a particle contamination and a method for determining a particle contamination in a measurement environment is provided in which individual particles in the measurement environment are detected (S), wherein a) an estimate of the number of particles per volume in the measurement environment is ascertained (S), b) an estimate of the number of particles per volume and characterization information describing the particle source in the measurement information are taken as a basis for ascertaining an output value for the particle contamination in the measurement environment (S), and c) context-related data are made available and the characterization information is estimated on the basis of the available context-related data (S). The estimation of the characterization information on the basis of the available context-related data avoids the conventional restriction of the evaluable characterization information to firmly prescribed information and instead provides flexible adaptation of the characterization information to be evaluated to the context-related data.

System and method for determining a particle contamination

Growing community of inventors

Neu-Ulm, Germany

Dominik Moser