Plansee Se

Dominik Lorenz

Joerg Winkler

Thomas Leiter

Enrico Franzke

Harald Koestenbauer

An electrically conductive, oxidic target material includes a proportion of substoichiometric molybdenum oxide phases of at least 60% by volume, an MoOphase in a proportion of 2-20% by volume, and optionally an MoOphase in a proportion of 0-20% by volume. The substoichiometric molybdenum oxide phase proportion is formed by one or more substoichiometric MoO-y phase(s), where y is in each case in a range from 0.05 to 0.25. A process for producing the target material and a process for using the target material are also provided.

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Reutte, Austria

Dominik Lorenz