Kla-tencor Technologies Corporation

Dominic David

Lisheng Gao

Scott Allen Young

Tong Huang

Tommaso Torelli

Michal Kowalski

Cho Huak Teh

Jianxin Zhang

Jonathan Oakley

Lalita A Balasubramanian

Chiuman Yeung

Michael Gordon Scott

Various computer-implemented methods for classifying defects on a specimen are provided. One method includes assigning individual defects detected on the specimen to defect groups based on one or more characteristics of the individual defects. The method also includes displaying information about the defect groups to a user. In addition, the method includes allowing the user to assign a classification to each of the defect groups. Systems configured to classify defects on a specimen are also provided. One system includes program instructions executable on a processor for assigning individual defects detected on the specimen to defect groups based on one or more characteristics of the individual defects. The system also includes a user interface configured for displaying information about the defect groups to a user and allowing the user to assign a classification to each of the defect groups.

Computer-implemented methods and systems for classifying defects on a specimen

A semiconductor measurement recipe architecture organized to include reusable sub-recipes, each defining at least one parameter associated with either a semiconductor wafer and/or a semiconductor disposed thereon, is disclosed. This recipe architecture will include a set of parameter dependencies, one or more which having a respective relationship with of the sub-recipes to permit safe and reliable sub-recipe reuse. Also disclosed is a recipe generation method including: determining an appropriate baseline existing recipe that's organized to include a set of parameter dependencies and dependency related sub-recipes; perceiving a dependency change; determining which, if any, of the sub-recipes of the existing recipe remain unaffected after the dependency change(s); and generating a new recipe using at least one of the sub-recipes found to be unaffected.

Reuse in semiconductor measurement recipes

Growing community of inventors

Campbell, CA, United States of America

Dominic David