Mcube, Inc.

Cooligy, Inc.

Dolf Van Der Heide

Kenneth E Goodson

Peng Zhou

Girish Upadhya

Shingo Yoneoka

An integrated MEMS inertial sensor device includes one or more three-axis MEMS inertial sensor devices, such as accelerometers, with dual or single proof mass configurations. These designs can be compact and can decouple the motion of each axis to minimize the measurement errors due to cross-axis sensitivity. Some embodiments include a frame to decouple the motion of two axes and to provide geometric symmetry. Some embodiments also include double-folded springs. In a specific embodiment, the three axes of an integrated MEMS accelerometer device are entirely decoupled. Thus, the actuation of each axis, through a force due to acceleration, has little or substantially no effect on the other axes.

MEMS-based dual and single proof-mass accelerometer methods and apparatus

A plate is thermally coupled to a heat generating device and thermally coupled to two heat pipes. Each heat pipe is configured to have a predetermined boiling point temperature selected according to design criteria. One or more additional heat pipes can be coupled to the plate. A heat spreader can be in thermal contact with the heat generating device and with at least one of the heat pipes. The heat pipes can differ in outer cross-sectional dimensions depending on thermal distance position relative to the heat generating device, such that the heat pipes located a farther thermal distance from the heat generating device have smaller outer cross-sectional dimensions than the heat pipes located a shorter thermal distance from the heat generating device.

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San Jose, CA, United States of America

Dolf Van Der Heide