Jusung Engineering Co., Ltd.

Sungwoo Hitech Co., Ltd.

Do Hyung Kim

Sung Ho Lee

Mun Yong Lee

Seok Jin Kang

Jong Kook Lee

Won Hee Cho

Kwang Su Yoo

Tae Young Kang

Byung Joon Park

Yun Gyu Ha

Woong Kyo Oh

Chang Guen Choi

Young Woon Kim

The present disclosure relates to a substrate processing apparatus capable of improving efficiency in a substrate processing process by adjusting a flow rate and residence time of gas and a plasma density according to process conditions. The substrate processing apparatus according to the embodiment of the present disclosure is advantageous in that it can enhance efficiency in the substrate processing process by decreasing the flow rate and increasing residence time of gas and the plasma density in the process of supplying the gas through the shape forming of the gas injection module including the first and second injection plates.

Substrate processing apparatus

A frame for a self-piercing rivet system that can provide bearing capacity for joining a rivet to a plate by using an anvil die and a punch unit is disclosed. An exemplary embodiment of the present invention provides a frame for a self-piercing rivet system provided with a punch unit on an upper portion thereof and an anvil unit on a lower portion thereof corresponding to the punch unit, that may include: an outer frame portion formed by connecting an inner semicircular body and an outer semicircular body which has a different radius and a central position from the inner semicircular body by a plurality of ribs; an inner frame portion formed by connecting both ends of a bending body to both ends of the inner semicircular body at the inside of the outer frame portion; an upper inner extender extended from an upper end of the inner frame portion; an upper outer extender extended from an upper end of the outer frame portion; a lower inner extender extended from a lower end of the inner frame portion; a lower outer extender extended from a lower end of the outer frame portion; a punch mounting end integrally formed at a front end of the upper inner extender and the upper outer extender; and an anvil mounting end integrally formed at a front end of the lower inner extender and the lower outer extender.

Frame for self-piercing rivet system

Light emitting diode (LED)

Umbrella

Growing community of inventors

Gwangju-si, South Korea

Do Hyung Kim