Samsung Electronics Co., Ltd.

Do-Hyun Cho

Dong-Hyun Kim

Won-Suk Choi

Woo-Dong Sung

Hwan-Ki Choi

Jae-Han Koo

Bok-Seok Yang

Jin-Suk Kim

A flow indicator comprising a housing and a floater and adapted to draw an air sample is provided. The housing has at least one lower inlet port, an interior space, an upper outlet port, and a transparent window. The floater is disposed inside the housing and is adapted to move substantially vertically in accordance with the flow of the air sample. The floater is also adapted to indicate a flow rate of the air sample.

Flow indicator and apparatus for monitoring particles in air

A fluid sampling apparatus and associated fluid analyzer sample process fluids used in semiconductor manufacturing at a plurality of measurement points. The fluid sampling apparatus includes a first nozzle assembly having a plurality of outlet nozzles. The plurality of outlet nozzles are connected to lines supplying the process fluids. A second nozzle assembly is installed above the first nozzle assembly and includes an inlet nozzle connected to an apparatus for measuring a contamination level of the process fluids. A motor is connected to the second nozzle assembly to align a selected outlet nozzle with the inlet nozzle. A pneumatic cylinder is coupled to the first nozzle assembly to connect the selected outlet nozzle with the inlet nozzle. In this manner, it is possible to measure the contamination level of process fluids supplied at a plurality of measurement points by using a single measuring apparatus.

Fluid sampling apparatus and fluid analyzer having the same

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Yongin-si, South Korea

Do-Hyun Cho