Imec Vzw

Globalfoundries Inc.

Dmitry Yakimets

Bartlomiej Jan Pawlak

Anshul Gupta

Pieter Schuddinck

An integrated circuit chip having fin-based active devices in the front end of line, and an electrical connection between a buried interconnect rail and a contact area on a semiconductor fin, such as an epitaxially grown source or drain contact area of a transistor, is disclosed. In one aspect, the electrical connection is realized without the intervention of a metallization level formed above the active devices in the IC. Instead, an interconnect via is produced between the buried interconnect rail and a lateral portion of the contact area, wherein the lateral portion is directly contacted by a sidewall of the interconnect via. Methods for producing the interconnect via are also disclosed.

Method for connecting a buried interconnect rail and a semiconductor fin in an integrated circuit chip

In one example, the method disclosed herein includes, among other things, forming a sacrificial structure around a plurality of stacked substantially un-doped nanowires at a location that corresponds to the channel region of the device, performing a selective etching process through a cavity to remove a second plurality of nanowires from the channel region and the source/drain regions of the device while leaving a first plurality of nanowires in position, and forming a metal conductive source/drain contact structure in each of the source/drain regions, wherein each of the metal conductive source/drain contact structures is positioned all around the first plurality of nanowires positioned in the source/drain regions.

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Leuven, Belgium

Dmitry Yakimets