Leibniz-institut Fuer Festkoerper-und Werkstoffforschung Dresden E.v.

Leibniz-institut Fuer Festkoerper-und Wrkstoffforschung Dresden E.v

Leibniz-institut Für Festkörper-und Werkstoffforschung Dresden E.v.

Dmitriy Karnaushenko

Oliver G Schmidt

Daniil Karnaushenko

Daniel Grimm

Denys Makarov

Martin Bauer

Three-dimensional micro devices usable as electromagnetic and magnetomechanical energy converters, as micromagnetic motors or generators, and methods for their production. The three-dimensional micro devices exhibit high efficiency even at dimensions on the microscale and below, and the method for production, as well as mass production, is simple and economical. Moreover, the three-dimensional micro devices at least include one three-dimensional device produced using roll-up technology. This three-dimensional device includes all functional and structural components for full functionality. At least one functional or structural component is an element that is at least partially freely movable at least partially within a surrounding element and is arranged such that it can be rotated at least around one of its axes.

Three-dimensional micro devices and method for their production

The present invention relates to the fields of physics, material sciences and micro and nano electronics, and concerns a method for producing a rolled-up electrical or electronic component, as can be used for example as a capacitor, or in aerials. The object of the present invention is to provide a low-cost, environmentally friendly and time-saving method for producing a rolled-up electrical or electronic component with many windings. The object is achieved by a method for producing a rolled-up component in which at least two functional and insulating layers, alternately arranged fully or partially over one another, are applied to a substrate with a sacrificial layer, wherein at least the functional or insulating layer that is arranged directly on the sacrificial layer has a perforation, at least on the two sides that are arranged substantially parallel to the rolling direction.

Method for producing a rolled-up electrical or electronic component

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Dresden, Germany

Dmitriy Karnaushenko