Applied Materials, Inc.

Dmitri A Brevnov

Sergey D Lopatin

Robert Z Bachrach

Connie P Wang

Eric H Liu

Eric Casavant

Lithium ion batteries, methods of making the same, and equipment for making the same are provided. In one or more embodiments, an integrated processing system operable to form a pre-lithiated electrode includes a reel-to-reel system operable to transport a continuous sheet of material through processing chambers and a pre-lithiation module defining a processing region and is adapted to process the continuous sheet of material. The pre-lithiation module contains a lithium metal target operable to contact and supplying lithium to the continuous sheet of material, a press coupled with the lithium metal target and operable to move the lithium metal target into contact with the continuous sheet of material, one or more ultrasonic transducers positioned in the processing region and operable to apply ultrasonic energy to the lithium metal target, and one or more heat sources positioned in the processing region and operable to heat the lithium metal target.

Pre-lithiation process for electrode by dry direct contact to lithium targets

Lithium-containing anodes, high performance electrochemical devices, such as secondary batteries, including the aforementioned lithium-containing electrodes, and methods for fabricating the same are provided. In one implementation, an anode electrode is provided. The anode electrode comprises a first diffusion barrier layer formed on a copper foil. The first diffusion barrier layer comprises titanium (Ti), molybdenum (Mo), tungsten (W), zirconium (Zr), hafnium (H), niobium (Nb), tantalum (Ta), or combinations thereof. The anode electrode further comprises a wetting layer formed on the first diffusion barrier layer. The wetting layer is selected from silicon (Si), tin (Sn), aluminum (Al), germanium (Ge), antimony (Sb), lead (Pb), bismuth (Bi), gallium (Ga), indium (In), zinc (Zn), cadmium (Cd), magnesium (Mg), oxides thereof, nitrides thereof, or combinations thereof. The anode electrode further comprises a lithium metal layer formed on the wetting layer.

Diffusion barrier films enabling the stability of lithium

Lithium ion batteries, methods of making the same, and equipment for making the same are provided. In one implementation, a method of fabricating a pre-lithiated electrode is provided. The method comprises disposing a lithium metal target comprising a layer of lithium metal adjacent to a surface of a prefabricated electrode. The method further comprises heating at least one of the lithium metal target and the prefabricated electrode to a temperature less than or equal to 180 degrees Celsius. The method further comprises compressing the lithium metal target and the prefabricated electrode together while applying ultrasound to the lithium metal target to transfer a quantity of lithium from the lithium metal target to the prefabricated electrode.

High capacity energy storage devices and energy storage device components, and more specifically, to a system and method for fabricating such high capacity energy storage devices and storage device components using processes that form three-dimensional porous structures are provided. In one embodiment, an anode structure for use in a high capacity energy storage device, comprising a conductive collector substrate, a three-dimensional copper-tin-iron porous conductive matrix formed on one or more surfaces of the conductive collector substrate, comprising a plurality of meso-porous structures formed over the conductive current collector, and an anodically active material deposited over the three-dimensional copper-tin-iron porous conductive matrix is provided. In certain embodiments, the three-dimensional copper-tin-iron porous conductive matrix further comprises a plurality of columnar projections formed on the conductive current collector with the plurality of meso-porous structure formed on the plurality of columnar projections.

Manufacturing of high capacity prismatic lithium-ion alloy anodes

A method and apparatus for forming a reliable and cost efficient battery or electrochemical capacitor electrode structure that has an improved lifetime, lower production costs, and improved process performance are provided. In one embodiment a method for forming a three dimensional porous electrode for a battery or an electrochemical cell is provided. The method comprises depositing a columnar metal layer over a substrate at a first current density by a diffusion limited deposition process and depositing three dimensional metal porous dendritic structures over the columnar metal layer at a second current density greater than the first current density.

Porous three dimensional copper, tin, copper-tin, copper-tin-cobalt, and copper-tin-cobalt-titanium electrodes for batteries and ultra capacitors

Embodiments of the present invention generally relate to lithium-ion batteries, and more specifically, to a system and method for fabricating such batteries using thin-film processes that form three-dimensional structures. In one embodiment, an anodic structure used to form an energy storage device is provided. The anodic structure comprises a flexible conductive substrate, a plurality of conductive microstructures formed on the conductive substrate, comprising a plurality of columnar projections and dendritic structures formed over the plurality of columnar projections and a plurality of tin particles formed on the plurality of conductive microstructures. In another embodiment, the anodic structure further comprises a tin nucleation layer comprising tin particles formed on the flexible conductive substrate between the flexible conductive substrate and the plurality of conductive microstructures.

Nucleation and growth of tin particles into three dimensional composite active anode for lithium high capacity energy storage device

A method for forming a battery from via thin-film deposition processes is disclosed. A mesoporous carbon material is deposited onto a surface of a conductive substrate that has high surface area, conductive micro-structures formed thereon. A porous, dielectric separator layer is then deposited on the layer of mesoporous carbon material to form a half cell of an energy storage device. The mesoporous carbon material is made up of CVD-deposited carbon fullerene 'onions' and carbon nano-tubes, and has a high porosity capable of retaining lithium ions in concentrations useful for storing significant quantities of electrical energy. Embodiments of the invention further provide for the formation of an electrode having a high surface area conductive region that is useful in a battery structure. In one configuration the electrode has a high surface area conductive region comprising a porous dendritic structure that can be formed by electroplating, physical vapor deposition, chemical vapor deposition, thermal spraying, and/or electroless plating techniques.

Thin film electrochemical energy storage device with three-dimensional anodic structure

Embodiments described herein generally relate to methods and apparatus for forming an electrode structure used in an energy storage device. More particularly, embodiments described herein relate to methods and apparatus for characterizing nanomaterials used in forming high capacity electrode structures for energy storage devices. In one embodiment a process for forming an electrode structure for an energy storage device is provided. The process comprises depositing a columnar metal structure over a substrate at a first current density by a diffusion limited deposition process, measuring a capacitance of the columnar metal structure to determine a surface area of the columnar metal structure, and depositing three dimensional porous metal structures over the columnar metal structure at a second current density greater than the first current density.

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Santa Clara, CA, United States of America

Dmitri A Brevnov