Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Universitaet Duisburg-Essen

Dirk Weiler

Hans-Joachim Quenzer

Frank Hochschulz

Kai-Marcel Muckensturm

Holger Vogt

Erik Verheyen

Tobias Kleinfeld

Robert Leitel

Robert Brüning

Martin Hubold

Described is an integrated vertical structure for infrared sensors, Peltier cooling, and thermoelectric generator applications consisting of a thermally insulating layer which is kept at a distance to a substrate by at least two spacers. In addition, the spacers have conductor structures which serve as thermoelectric elements. A method realizes manufacturing the integrated thermoelectric structure, a method realizes the operation of the integrated thermoelectric structure as a detector, a further method realizes the operation of the integrated thermoelectric structure as a thermoelectric generator, and a method realizes the operation of the integrated thermoelectric structure as a thermoelectric Peltier element.

Integrated thermoelectric structure, method for manufacturing an integrated thermoelectric structure, method for operating same as a detector, thermoelectric generator and thermoelectric Peltier element

A radiation detector includes a substrate and a membrane suspended above the substrate by spacers, wherein the spacers electrically contact a radiation sensor formed in the membrane and thermally insulate the membrane from the substrate.

Radiation detector and method for manufacturing a radiation detector

A radiation detector with a substrate and a membrane, which is suspended above the substrate by a spacer is described, wherein the spacer thermally insulates a radiation sensor, which is formed in the membrane, from the substrate. Further, the spacer includes a first layer, which is electrically conducting and contacts a first pole of the radiation sensor and of the substrate, and a second layer, which is electrically conducting and electrically insulated from the first electrically conductive layer and contacts a second pole of the radiation sensor and of the substrate, wherein the second pole differs in polarity from the first pole.

Radiation detector, array of radiation detectors and method for manufacturing a radiation detector

Growing community of inventors

Herne, Germany

Dirk Weiler