Trumpf Lasersystems for Semiconductor Manufacturing Gmbh

Dirk Sodtke

Jonathan Mueller

Viktor Granson

The invention relates to a method for determining at least one beam propagation parameter (M, w, &#x3b8;, z) of a laser beam, comprising: directing the laser beam through a lens arrangement towards a spatially resolving detector, imaging the laser beam at a plurality of different focus positions (F, . . . ) relative to the spatially resolving detector by adjusting a focal length (f, . . . ) of the lens arrangement, and determining the at least one beam propagation parameter (M, w, &#x3b8;, z) by evaluating an intensity distribution (l(x,y)) of the laser beam on the spatially resolving detector at the plurality of different focus positions (F, . . . ). The method comprises adjusting the focal length (f, . . . ) of the lens arrangement by arranging lens elements (A, . . . ; B, . . . ) having different focal lengths (f, . . . ; f, . . . ) in a beam path of the laser beam.

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Tuebingen, Germany

Dirk Sodtke