Leybold Gmbh

Oerlikon Leybold Vacuum Gmbh

Dirk Schiller

Thomas Dreifert

Wolfgang Giebmanns

Roland Müller

Max Pelikan

Daniel Reinhard

Raffaello Ghislotti

Sebastian Walzel

Holger Dietz

Daniel Schneidenbach

Dirk Stratmann

Hannes Kamecke

Magnus Janicki

Gerhard Wilhelm Walter

Michael Pajonk

Matthias Nahrwold

A vacuum pump system comprising a main vacuum pump that is connected to a chamber that is to be evacuated. An auxiliary pump is connected to an outlet of the main vacuum pump. Furthermore, a sealing gas supply device is connected to the main vacuum pump. The sealing gas supply device is switched on and off with the aid of a control device as a function of a predetermined control variable. Additionally, a method for controlling the vacuum pump system.

Vacuum pump system and method for operating a vacuum pump system

A processing chamber is connected to a lock chamber. For evacuating the lock chamber and/or the processing chamber a vacuum pump system is provided. The latter comprises a vacuum pump equipment having at least one vacuum pump. Further, the vacuum pump system comprises a valve device for connection to the lock chamber as well as a controller. For noise reduction, a cyclically occurring operating parameter is determined by means of the controller. From said parameter it is determined at which point in time the valve is opened such that temporally before the opening of the valve the rotational speed of at least one of the vacuum pumps can be reduced. This results in a considerable noise reduction at continuing good pump-out times.

Method for operating a vacuum pump system

A screw vacuum pump comprises a housing forming a pumping chamber, wherein the housing is made of aluminum or an aluminum alloy. Further provided are two screw rotors arranged in the pumping chamber, each screw rotor comprising at least one displacer element having a helical recess for forming a plurality of windings, wherein the at least one displacer element is made of aluminum or an aluminum alloy. Between the region in which prevail 5% to 30% of the outlet pressure and a pressure-side end of the rotor (pump outlet), at least six, particularly at least eight, and with particular preference at least ten windings are provided.

Screw vacuum pump without internal cooling

A vacuum pump screw rotor, comprising at least two helical displacer elements on a rotor shaft. The at least two displacer elements have different pitches, but the pitches of each displacer element are constant. Furthermore, the displacer elements each have a helical recess, each having a contour that remains the same over its entire length. Hereby, a suction-side displacer element has a recess having an asymmetric contour, and a pressure-side displacer element has a recess having a symmetrical contour.

Vacuum pump screw rotors with symmetrical profiles on low pitch sections

A vacuum pump system is provided that includes a main vacuum pump that is connected to a chamber that is to be evacuated. An auxiliary pump is connected to an outlet of the main vacuum pump. Furthermore, a sealing gas supply device is connected to the main vacuum pump. The sealing gas supply device is switched on and off with the aid of a control device as a function of a predetermined control variable. Additionally, a method for controlling the vacuum pump system.

A vacuum pump system for evacuating a chamber, in particular a lock or a process chamber, is provided that includes a main vacuum pump preferably configured as a screw pump. An inlet of the main vacuum pump is connected with the chamber to be evacuated. As seen in the feeding direction of the main vacuum pump an auxiliary vacuum pump is arranged which is in particular a Roots pump. An outlet area of the main vacuum pump is connected with a main outlet on the one hand and an inlet of the auxiliary vacuum pump on the other hand. Further, an outlet of the auxiliary vacuum pump is connected with the main outlet.

Vacuum pump system

A vacuum pump, in particular a pump of the type with rolling bodies, includes rotary bodies () arranged in a suction chamber (). The pressure side () of the pump is connected to the suction side () by a connecting channel (). In the connecting channel (), a valve () is arranged which closes a through opening (). On exceeding a set pressure difference between the pressure side () and the suction side (), the valve opens automatically. In order to reduce the necessary space and to reduce the switching noise from the valve, the valve body is embodied as a valve flap ().

Vacuum pump in particular roots type pump

A vacuum device comprises a plurality of cryopumps () connected with one or a plurality of vacuum chambers. The cryopumps () are connected via media supply conduits () and media return conduits () with a compressor (). An adjusting device () is connected before at least one of the cryopumps for controlling the amount of media fed to the cryopump. Further, the cryopumps () comprise a temperature measuring device. The temperature measuring device and the adjusting device () are connected with a controller (). To allow the desired amount of media to be fed to the cryopumps (), the adjusting device () comprises a throttle () in a media supply conduit () and a controllable valve in a throttle bypass conduit ().

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Hürth, Germany

Dirk Schiller