Lam Research Corporation

Lam Research Foundation

Dirk Rudolph

Ramesh Chandrasekharan

Aaron Durbin

Thomas G Jewell

Christopher-James Parker

David Michael French

Antonio Xavier

John Folden Stumpf

Devon Pelkey

Ales Janhar

Justin Remulla

Eric Tu

Keith Joseph Batryn

Mark James Garfield Hnatiuk

In some examples, an array sensor temperature control system is provided. The system may include an array sensor for generating a two-dimensional image, the two-dimensional image including a plurality of pixels or cells indicative of a temperature of a monitored component; a controller for controlling a heating or cooling device to adjust the temperature of the monitored component; and an array sensor controller activated by a power source and being in communication with the array sensor and controller.

Temperature monitoring

Various embodiments include methods and apparatuses to test production tools and related electrical components therefor including individual printed-circuit boards (PCBs). In one example, a test-plug hardware-platform includes at least one input/output (I/O) connector, and a configurable control system to provide command and operational signals through the I/O connector and collect data through the I/O connector from at least one PCB under test. A wireless-mesh network within the test-plug hardware-platform can interface wirelessly with at least the PCB under test. The at least one PCB operating within a production tool or other piece of equipment. Other methods and systems are disclosed.

Wireless electronic-control system

Various embodiments include methods and apparatuses to provide human safety and machine safety and operations. In one example, a distributed interlock system includes at least one master device coupled to a number of slave device. The slave devices receive signals from one or more tools and provide the signals to the master device. The master device evaluates the signals and prevents unsafe conditions prior to one or more command executions, related to the unsafe conditions, being transmitted to one or more of the slave devices. Other methods and systems are disclosed.

Configurable distributed-interlock-system

A method for controlling temperature of a substrate support includes receiving first and second currents corresponding to first and second heater elements, respectively, of a substrate support, receiving first and second voltages corresponding to the first and second heater elements, respectively, calculating a first resistance of the first heater element based on the first voltage and the first current, calculating a second resistance of the second heater element based on the second voltage and the second current, calculating a first temperature of a first zone of the substrate support based on the first resistance and stored data correlating resistances to temperatures, calculating a second temperature of a second zone of the substrate support based on the second resistance and the stored data, and selectively adjusting the stored data based on a comparison between a sensed temperature and at least one of the calculated first temperature and second temperature.

Use of voltage and current measurements to control dual zone ceramic pedestals

Systems and methods for determining a fault in a gas heater channel are described. One of the methods includes receiving measured parameters associated with a plurality of heater elements of the gas heater channel. The gas heater channel transfers one or more gases from a gas supply to a plasma chamber. The method further includes calculating a measured parallel resistance of the plurality of heater elements from the measured parameters, comparing the measured parallel resistance to an ideal parallel resistance of the heater elements of the gas heater channel, and determining based on the comparison that a portion of the gas heater channel is inoperational. The method includes selecting an identity of one of the heater elements from a correspondence between a plurality of identities of the heater elements and the measured parallel resistance.

Methods and systems for determining a fault in a gas heater channel

A controller for a substrate processing system includes a resistance calculation module configured to receive a first current and a second current corresponding to a first heater element and a second heater element, respectively, of a substrate support, receive a first voltage and a second voltage corresponding to the first heater element and the second heater element, respectively, calculate a first resistance of the first heater element based on the first voltage and the first current, and calculate a second resistance of the second heater element based on the second voltage and the second current. A temperature control module is configured to separately control power provided to the first heater element and the second heater element based on the first resistance and the second resistance, respectively, and respective relationships between the first and second resistances and first and second temperatures of the substrate support.

A throttle valve includes a throttle body including a housing having an inner surface. The throttle body includes first and second stop surfaces arranged on the inner surface. A throttle plate is rotatable inside the housing of the throttle body about a shaft between closed and open positions. A first projection is located on a first surface of the throttle plate adjacent to a radially outer end of the throttle plate. A second projection is located on a second surface of the throttle plate adjacent to a radially outer end of the throttle plate. The second surface is opposite the first surface. The first and second projections extend outwardly from the throttle plate in opposite directions and in corresponding directions of rotational movement of the throttle plate during closing to bias against the second stop surface when the throttle valve is closed.

High-conductance, non-sealing throttle valve with projections and stop surfaces

A power converter module is connected to an electrical power supply and is configured to generate a first voltage and a second voltage for controlling operation of a valve, where the valve includes a solenoid for affecting opening and closing of the valve. The first voltage is a boost voltage for accelerating opening of the valve. The second voltage is a holding voltage for maintaining the valve in an open state. A boost control module is configured to control supply of the first voltage to the solenoid of the valve in accordance with a first state of an opening boost control signal when a valve control signal directs opening of the valve, and is configured to control supply of the second voltage to the solenoid of the valve in accordance with a second state of the opening boost control signal when the valve control signal directs opening of the valve.

Growing community of inventors

Dundee, OR, United States of America

Dirk Rudolph