Oerlikon Leybold Vacuum Gmbh

Dirk Kalisch

Roland Blumenthal

Ralf Adamietz

A device (), for evacuating a chamber to pressures in the high vacuum range includes a suction-side vacuum pump () and an atmospheric-pressure-side vacuum pump (). The suction-side vacuum pump () is a mechanical kinetic vacuum pump with a rotor () and a stator (). The stator () has a rotationally-symmetrical inner surface which matches the outer rotor geometry. The rotor () in the mechanical kinetic vacuum pump () is provided with a structure () carrying out the gas pumping. Said gas pumping structure comprises webs (), the angle and width of which decrease from the suction side to the pressure side. The gas throughflow is improved. The outer diameter of the rotor () and the inner diameter of the stator () of the suctnion-side pump decrease from the suction side to the pressure side.

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Kö'ln, Germany

Dirk Kalisch