Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Christian-albrechts-universitaet Zu Kiel

Christian-albrechts-universitat Zu Kiel

Dirk Kaden

Bernhard Wagner

Shanshan Gu-Stoppel

Fabian Lofink

Simon Fichtner

Christian Eisermann

A ferroelectric material includes a mixed crystal having AlN and at least one nitride of a transition metal. The proportion of the nitride of the transition metal is selected such that a direction of an initial or spontaneous polarity of the ferroelectric material is switchable by applying a switchover voltage. The switchover voltage is below a breakdown voltage of the ferroelectric material.

Ferroelectric material, MEMS component comprising a ferroelectric material, MEMS device comprising a first MEMS component, method of producing a MEMS component, and method of producing a CMOS-compatible MEMS component

Apparatuses with actuators having actuator-side attachment areas disposed thereon, an optical element having mirror-side attachment areas disposed thereon and springs are described, wherein an optical element is connected to actuators via two or four springs.

Apparatus comprising a spring and an optical element suspended thereon

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Itzehoe, Germany

Dirk Kaden