Leybold Aktiengesellschaft

Leybold-Heraeus Gmbh

Fa.jungheinrich Unternehmensverwaltung Kg

Dirk Helms

Friedrich Anderle

Anton Pawlakowitsch

Werner Katzschner

In an apparatus for mounting discoidal substrates in a vacuum chamber for reactive ionic etching purposes, a substrate holder joined to a hollow shaft and a bottom plate under the substrate holder are disposed, which together with spacers and a clamping ring form a displaceable cage partially surrounding the substrate holder and held coaxial to the latter, while the substrate which can be introduced through a gap in the lateral wall of the cage betwen two spacers can be laid on the substrate holder and locked in place there by the clamping ring after a relative movement between the substrate holder and the cage.

Apparatus for mounting workpieces

An inserter for vacuum installations has a two-part arm provided with a driving and, a single joint and an end for holding an object. The arm can turn in at least one horizontal plane about a vertical main axis disposed in the area of the driving end, and has at least one motor for moving the arm about the main axis and changing the angle between the parts of the arm at the joint. This inserter is constructed such that: (a) the main axis is surrounded by a housing in which an outer hollow shaft is rotatably disposed, with a central shaft coaxial therewith, the outer hollow shaft being co-rotational with the drive end of the lever and with the central shaft, there being a transmission mechanism which acts on a rotatable stubshaft belonging to the joint and supporting the outer part of the lever which has the holding end; (b) one independently operated motor is connected with the hollow shaft and another is connected with the central shaft for respective independent rotation of these parts; (c) the inner part of the lever is in the form of a hermetically sealed hollow body containing the mechanism that couples the central shaft to the subshaft; and (d) the bearings of the hollow shaft and stubshaft are sealed from the interior of the vacuum system by at least low-friction, preferably friction-free, sealing elements.

Inserting device for vacuum apparatus

A swivel head for industrial robots has two degrees of freedom, which are associated with respective spindles having intersecting axes. A first spindle serves to swivel a tool and a second spindle serves to rotate the tool. The swivel head also comprises two concentric drive shafts, which extend one in the other and carry bevel gears. One of said bevel wheels is a driving bevel gear for directly driving the second spindle by means of a bevel gear mounted on said second spindle. The other bevel gear drives a swiveling bevel gear mounted on the first spindle. In that swivel head a speed-reducing tansmission having a high reduction ratio is connected to the second spindle and serves to drive a tool carrier. The swiveling bevel gear directly carries a bearing bracket, which carries the tool shaft and intermediate gears of the transmission. The housing of the swivel head consists of a rigid part and a movable part.

Growing community of inventors

Ahrensburg, Germany

Dirk Helms