Gebr. Schmid Gmbh + Co.

Gebr. Schmid Gmbh

Schmid Technology Systems Gmbh

Rena Gmbh

Dirk Habermann

Christian Schmid

Josef Gentischer

Heinz Kappler

Jürgen Haungs

Kenneth Provancha

Chuck Attema

Tom Stewart

Martin Schoch

Patrik Müller

Maher Izaaryene

Friedhelm Stein

Ernst Hartmannsgruber

In an apparatus for producing thin layers on substrates for solar cell production, wherein the thin layers are applied by an APCVD process at temperatures of more than 250&#xb0; C., the substrates are conveyed on a horizontal conveyor path and coated by means of an APCVD coating in continuous operation. The conveyor path has conveyor rollers, which consist of a temperature-resistant, non-metallic material, preferably of ceramic. A heating device and/or a purge gas feeding device is/are arranged on that side of the conveyor path which is remote from the coating apparatus.

Apparatus and process for producing thin layers

A method for the selective doping of silicon of a silicon substrate () for producing a pn-junction in the silicon is characterized by the following steps: a) Providing the surface of the silicon substrate () with a doping agent () based on phosphorous, b) heating the silicon substrate () for creating a phosphorous silicate glass () on the surface of the silicon, wherein phosphorous diffuses into the silicon as a first doping (), c) applying a mask () on the phosphorous silicate glass (), covering the regions () that are later highly doped, d) removing the phosphorous silicate glass () in the non-masked regions, e) removing the mask () from the phosphorous silicate glass (), f) again heating for the further diffusion of phosphorous from the phosphorous silicate glass () into the silicon as a second doping for creating the highly doped regions (), g); complete removal of the phosphorous silicate glass () from the silicon.

Method for the selective doping of silicon and silicon substrate treated therewith

In a method for the production of a solar cell, a flat aluminium layer is applied to the back of a solar cell substrate. The aluminium is alloyed into the silicon substrate by the effect of the temperature and forms an aluminium BSF. The remaining aluminium that has not been alloyed into the silicon is subsequently removed. The aluminium BSF is transparent to light.

Method for the manufacture of a solar cell and the resulting solar cell

A device for positioning and blocking thin silicon wafers after wire-sawing a silicon wafer block. The device comprises a cassette that accommodates the wafer block and is provided with two contact strips whose sides facing the wafer block encompass elements which engage into narrow cutting gap between the wafers so as to maintain a distance and provide support. This allows the wafers to be fixed in the position thereof even after removing a supporting glass plate such that particularly the gap in the area of the former connecting point to the removed supporting glass plate is maintained and the subsequent singulation process is simplified.

Device and method for positioning and blocking thin substrates on a cut substrate block

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Kirchzarten, Germany

Dirk Habermann