Asml Netherlands B.v.

Dirk Ewoud Boonzajer Flaes

Stefan Michiel Witte

Kjeld Sijbrand Eduard Eikema

In an inspection apparatus, a target on the surface is illuminated with illuminating radiation that comprises first and second illuminating components. The illuminating components form one or more periodic illuminating patterns on the surface. A plurality of scattered radiation patterns formed by the illuminating radiation after scattering by the target is captured at a detector for a number of values of a controllable characteristic of at least one of the illuminating components. The captured radiation is then used to reconstruct data describing the target.

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Amsterdam, Netherlands

Dirk Ewoud Boonzajer Flaes