Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Institut Polytechnique De Grenoble

Dirk Ettelt

Arnaud Walther

Philippe Robert

Bernard Viala

Guillaume Jourdan

Patrice Rey

Jerome Delamare

Gor Lebedev

Jérome Delamare

Robert Philippe

A mechanical connection between two parts of a microelectromechanical and/or nanoelectromechanical structure forming a pivot with an axis of rotation pivot includes two first beams with an axis parallel to the pivot axis, the first beams configured to work in torsion, and two second beams with an axis orthogonal to the axis of the first beams, the second beams configured to work in bending, each one of the first and second beams being connected at their ends to the two parts of the structure.

Mechanical connection forming a pivot for MEMS and NEMS mechanical structures

A magnetic field sensor comprises a substrate and a moving part which is displaced when subjected to a Laplace force. There is a gauge for measuring the displacement of the moving part. There is a suspended lever that is rotationally displaced about an axis of rotation at right angles to the direction of displacement of the moving part. The lever is connected to the moving part to transmit displacement of the moving part to the lever to cause rotation of the lever about the axis of rotation. The lever is also connected to a first part of the gauge. The sensor comprises a hinge that connects the lever to the substrate. The hinge allows the rotation of the lever about its axis of rotation and is rigid to allow for a lever arm effect. The second part of the gauge is fixed with no degree of freedom to the substrate.

Sensor for magnetic fields with Laplace force

A device for measuring magnetic fields with Laplace force, comprising a substrate extending in a substrate plane, a first rigid frame in a first plane moveable relative to the substrate about a first rotation axis parallel to the substrate plane with a central through-recess. There is a fixed electrical conductor wound an axis perpendicular to the plane of the first frame. There a first hinge connecting the first rigid frame to the substrate with a first electrical track. There is a second hinge connected to the first rigid frame with a second electrical track. There is a first sensor for measuring of the angular displacement of the first rigid frame. The first hinge and the first electrical track are inside the central recess of the first rigid frame and the second hinge and the second electrical track are outside the central recess of the first rigid frame.

Device for measuring magnetic fields with Laplace force

A magnetic field vector sensor includes a substrate parallel to a plane, a support mobile relative to it and rotatable about a vertical rotation axis perpendicular to it, a magnetic field source generating a field having a moment in a non-perpendicular direction, the source being fixed to the support with no degree-of-freedom to exert torque on the support when a field to be measured is present, the field being non-collinear with the moment, a transducer to convert torque exerted on the support into a field amplitude of a component of the field along a measurement axis in the plane, wherein the source comprises a magnetostrictive permanent magnet for generating the field having a moment whose direction varies with stress on the magnet, and wherein the sensor further comprises a controllable device to reversibly modify the moment direction, and a stress generator to vary stress and hence moment direction.

Magnetic field vector sensor

Growing community of inventors

Gelsenkirchen, Germany

Dirk Ettelt