Mks Instruments, Inc.

Dinh-Vuong Le

Jeongseok Jang

Hohyoung Lee

Jaechul Jung

Ngoc-Hung Nguyen

A RF power generator has a RF power source configured to generate an output signal. A power splitter is configured to receive the output signal and generate a plurality of split signals. A demagnetizing circuit is configured to receive the plurality of split signals. The demagnetizing circuit is configured to include a plurality of inductances corresponding to the plurality of split signals. The plurality of inductances is configured to reduce the effects of mutual impedance of an ICP chamber in series with the plurality of inductances so that a ratio between a pair of the plurality of split signals varies substantially linearly as one of the pair of the plurality of split signals is varied.

Growing community of inventors

Yuseong-gu, South Korea

Dinh-Vuong Le