Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Esc Inc. (1 from 4 patents)
2. Advanced Technology Materials, Inc. (622 patents)
1 patent:
1. 6492308 - Post chemical-mechanical planarization (CMP) cleaning composition