Industrial Technology Research Institute

Ding-Kun Liu

Hau-Wei Wang

Chia-Hung Cho

Chih-Hsiang Chan

Yong-Tong Zou

A detection system for a multilayer film is provided. The detection system for a multilayer film includes a light source device, a first image capture device, a second image capture device and an image processing device. The light source device projects a pair of parallel incident light to a transparent multilayer film obliquely. The pair of parallel incident light is projected onto the transparent multilayer film for producing and enabling a forward scattered light and a back scattered light to be projected therefrom. The first image capture device captures the back scattered light to produce a first image. The second image capture device captures the forward scattered light to produce a second image. The image processing device is coupled to the first image capture device and the second image capture device. The image processing device is used to compares and detect the differences between the second image and the first image.

Detection system for a multilayer film and method thereof using dual image capture devices for capturing forward scattered light and back scattered light

An embodiment of the invention provides an apparatus for measuring a conductive pattern on a substrate, which includes a first electro-optical modulator surrounding at least one first detecting roller; transmission rollers for transferring the substrate and allowing direct contact of the substrate and the first electro-optical modulator; a voltage supplier for providing a bias between the first electro-optical modulator and the substrate; and a first image detecting system for receiving a first detecting light reflected from a first surface of the substrate.

Growing community of inventors

Hsinchu County, Taiwan

Ding-Kun Liu