International Business Machines Corporation

Dinesh Gupta

Kamal Kumar Sikka

Fee Li Lie

Dario Leonardo Goldfarb

Daniel A Corliss

Jon Alfred Casey

Donald Francis Canaperi

John Ulrich Knickerbocker

Robert Anthony Rita

Ravi K Bonam

Brenda Lee Peterson

David Clifford Long

Joshua M Rubin

Lester W Herron

Jawahar P Nayak

Lawrence Alfred Clevenger

Mukta G Farooq

Charles Leon Arvin

Arvind Kumar

Mark Vincent Pierson

Eugen Schenfeld

James John Kelly

Subhash Laxman Shinde

Harry David Cox

Kevin R Winstel

Mark William Kapfhammer

John Joseph Garant

Iqbal Rashid Saraf

Steve Ostrander

Robert J Sullivan

Maryse Cournoyer

Jeffrey A Brody

Valérie Anne Oberson

James Robert Wylder

Govindarajan Natarajan

Raschid Jose Bezama

Sudipta Kumar Ray

Wiren Dale Becker

Steven Paul Ostrander

James N Humenik

Thomas Edward Lombardi

Lisa Jeanine Jimarez

Monty Montague Denneau

David B Goland

Herbert I Stoller

Hsichang Liu

Keith C O'Neil

Kathleen M Wiley

Paul G McLaughlin

John A Trumpetto

Charles Timothy Ryan

L Wynn Herron

Ahmed Sayeed Shah

Evelyn Barrington

Lorraine Di Piero-Simmonds

Edward J Hassdenteufel, Iii

Richard C Steger

John Paul Gauci

Dale W Snowdon

The subject disclosure relates to 3D microelectronic chip packages with embedded coolant channels. The disclosed 3D microelectronic chip packages provide a complete and practical mechanism for introducing cooling channels within the 3D chip stack while maintaining the electrical connection through the chip stack. According to an embodiment, a microelectronic package is provided that comprises a first silicon chip comprising first coolant channels interspersed between first thru-silicon-vias (TSVs). The microelectronic chip package further comprises a silicon cap attached to a first surface of the first silicon chip, the silicon cap comprising second TSVs that connect to the first TSVs. A second silicon chip comprising second coolant channels can further be attached to the silicon cap via interconnects formed between a first surface of the second silicon chip and the silicon cap, wherein the interconnects connect to the second TSVs.

Three-dimensional microelectronic package with embedded cooling channels

Direct bonding heterogeneous integration packaging structures and processes include a packaging substrate with first and second opposing surfaces. A trench or a pedestal is provided in the first surface. A bridge is disposed in the trench or is adjacent the pedestal sidewall, wherein the bridge includes an upper surface coplanar with the first surface of the package substrate. At least two chips in a side by side proximal arrangement overly the bridge and the packaging substrate, wherein the bridge underlies peripheral edges of the at least two chips in the side by side proximal arrangement. The at least two chips include a plurality of electric connections that are directly coupled to corresponding electrical connections on the bridge and on the packaging substrate.

Direct bonded heterogeneous integration packaging structures

A stacked semiconductor microcooler includes a first and second semiconductor microcooler. Each microcooler includes silicon fins extending from a silicon substrate. A metal layer may be formed upon the fins. The microcoolers may be positioned such that the fins of each microcooler are aligned. One or more microcoolers may be thermally connected to a surface of a coolant conduit that is thermally connected to an electronic device heat generating device, such as an integrated circuit (IC) chip, or the like. Heat from the electronic device heat generating device may transfer to the one or more microcoolers. A flow of cooled liquid may be introduced through the conduit and heat from the one or more microcoolers may transfer to the liquid coolant.

Semiconductor microcooler

A stacked semiconductor microcooler includes a first microcooler and a second microcooler. The microcoolers may be positioned such that the fins of each microcooler are vertically aligned. The microcoolers may include an inlet passage to accept coolant and an outlet passage to expel the coolant. One or more microcoolers may be thermally connected to an electronic device heat generating device, such as an integrated circuit (IC) chip, or the like. Heat from the electronic device heat generating device may transfer to the one or more microcoolers. A flow of cooled liquid may be introduced through the passages and heat from the one or more microcoolers may transfer to the liquid coolant.

A semiconductor wafer includes a first substrate and a first etch stop layer formed on the first substrate. The etch stop layer has an opening. The semiconductor wafer further includes a second substrate and a second etch stop layer formed on the second substrate. The first substrate is bonded on top of the second substrate such that the first etch stop layer is positioned between the first substrate and the second substrate. A trench is formed in the opening.

Semiconductor wafer having trenches with varied dimensions for multi-chip modules

Package structures and methods are provided for constructing multi-chip package structures using semiconductor wafer-level-fan-out techniques in conjunction with back-end-of-line fabrication methods to integrate different size chips (e.g., different thicknesses) into a planar package structure. The packaging techniques take into account intra-chip thickness variations and inter-chip thickness differences, and utilize standard back-end-of-line fabrication methods and materials to account for such thickness variations and differences. In addition, the back-end-of-line techniques allow for the formation of multiple layers of wiring and inter-layer vias which provide high density chip-to-chip interconnect wiring for high-bandwidth I/O communication between the package chips, as well as redistribution layers to route power/ground connections between active-side connections of the semiconductor chips to an area array of solder bump interconnects on a bottom side of the multi-chip package structure.

Planar wafer level fan-out of multi-chip modules having different size chips

A semiconductor microcooler is fabricated by forming fins in a semiconductor substrate and forming a metal layer upon the fins. A stacked microcooler may be formed by stacking a plurality of semiconductor microcoolers. The microcoolers may be positioned such that the fins of each microcooler are vertically aligned. The microcoolers may include an inlet passage to accept coolant and an outlet passage to expel the coolant. One or more microcoolers may be thermally connected to an electronic device heat generating device, such as an integrated circuit (IC) chip, or the like. Heat from the electronic device heat generating device may transfer to the one or more microcoolers. A flow of cooled liquid may be introduced through the passages and heat from the one or more microcoolers may transfer to the liquid coolant.

A semiconductor microcooler is fabricated by forming fins in a semiconductor substrate and forming a metal layer upon the fins. A stacked microcooler may be formed by stacking a plurality of semiconductor microcoolers. The microcoolers may be positioned such that the fins of each microcooler are aligned. One or more microcoolers may be thermally connected to a surface of a coolant conduit that is thermally connected to an electronic device heat generating device, such as an integrated circuit (IC) chip, or the like. Heat from the electronic device heat generating device may transfer to the one or more microcoolers. A flow of cooled liquid may be introduced through the conduit and heat from the one or more microcoolers may transfer to the liquid coolant.

Techniques that facilitate a copper microcooler structure are provided. In one example, a device includes a first copper microcooler structure and a second copper microcooler structure. The first copper microcooler structure includes a first copper plate and a first set of copper channels attached to the first copper plate. The second copper microcooler structure includes a second copper plate and a second set of copper channels attached to the second copper plate. A surface of the second copper plate associated with the second copper microcooler structure is bonded to one or more surfaces of the first set of copper channels associated with the first copper microcooler structure via a fusion bond.

Copper microcooler structure and fabrication

Optical cubes and optical cube assemblies for directing optical beams are provided. The optical cubes are optically transparent modules that can be adapted to reflect, transmit, and/or partially reflect and transmit optical beams. The optical cubes may include bi-direction or multi-direction beam directing elements for directing optical beams. The optical cube assemblies may include flexible chip assemblies attached to optical cubes. The chip assemblies may include vertical cavity surface-emitting lasers for emitting optical beams or receivers for receiving optical beams mounted on a flexible and electrical interconnect mounting assembly.

Optical assemblies for transmitting and manipulating optical beams

A multi chip module substrate arranged with repair vias and repair lines extending between repair vias of the chip sites of the module by which repairs can be effected to overcome defects in the module circuits and a method for effecting the repairs of defects in the circuits of this module. A defect can occur in any one of a first signal via, a second signal via, and a circuit line extending between and intended to electrically connect the first signal via and the second signal via. After a defective circuit is identified, the signal vias of the circuit are isolated. Then, the first signal via of the defective circuit is electrically connected to that repair via of the chip site having the first signal via that is connected to that repair via of the chip site having the second signal via and the second signal via of the defective circuit is electrically connected to that repair via of the chip site having the second signal via that is connected to that repair via of the chip site having the first signal via.

Apparatus and method for repairing electronic packages

Growing community of inventors

Hopewell Junction, NY, United States of America

Dinesh Gupta