Globalfoundries Inc.

Dina H Triyoso

Rohit Pal

George Robert Mulfinger

Changyong Xiao

Mitsuhiro Togo

Yiqun Liu

Judson Robert Holt

Sanford Chu

Robert Fox

Timothy James McArdle

David Paul Brunco

Klaus Hempel

Ryan W Sporer

Shao-Fu S Chu

Bo Yu

Lili Cheng

Amy L Child

Jeasung Park

A pFET includes a semiconductor-on-insulator (SOI) substrate; and a trench isolation within the SOI substrate, the trench isolation including a raised portion extending above an upper surface of the SOI substrate. A compressive channel silicon germanium (cSiGe) layer is over the SOI substrate. A strain retention member is positioned between at least a portion of the raised portion of the trench isolation and the compressive cSiGe layer. A gate and source/drain regions are positioned over the compressive cSiGe layer.

Strain retention semiconductor member for channel SiGe layer of pFET

Methods for selectively thinning a silicon channel area under a gate electrode and resulting devices are disclosed. Embodiments include providing a SOI substrate including a Si-layer; providing a first dummy-gate electrode over a first gate-oxide between first spacers over a first channel area of the Si-layer and a second dummy-gate electrode over a second gate-oxide between second spacers over a second channel area of the Si-layer; forming a S/D region adjacent each spacer; forming an oxide over the S/D regions and the spacers; removing the dummy-gate electrodes creating first and second cavities between respective first and second spacers; forming a mask with an opening over the first cavity; removing the first gate-oxide; thinning the Si-layer under the first cavity, forming a recess in the Si-layer; forming a third gate-oxide on recess side and bottom surfaces; and filling the recess and the cavities with metal, forming first and second RMG electrodes.

Method for late differential SOI thinning for improved FDSOI performance and HCI optimization

Integrated circuits and methods of forming the same are provided. An exemplary method of forming an integrated circuit includes forming a dummy gate structure overlying a semiconductor substrate. The dummy gate structure includes a gate dielectric layer, a dummy gate layer, an etch stop layer, and a dummy gate cap layer. First sidewall spacers are formed adjacent to sidewalls of the dummy gate structure. A source and drain region are formed in the semiconductor substrate adjacent to the first sidewall spacers. A dielectric material is deposited adjacent to the first sidewall spacers. The dummy gate cap layer is etched with a first etchant selective thereto after depositing the dielectric material. The etch stop layer is etched with a second etchant that is selective thereto. The dummy gate layer is etched to form a gate recess, and a gate material is deposited in the gate recess.

Integrated circuits and methods of forming the same with effective dummy gate cap removal

Integrated circuits including a MIMCAP device and methods of forming the integrated circuits are provided. An exemplary method of forming an integrated circuit including a MIMCAP device includes pre-determining a thickness of at least one of a bottom high-K layer or a top high-K layer of the MIMCAP device, followed by fabricating the MIMCAP device. The pre-determined thickness is established based upon a pre-determined TDDB lifetime for the MIMCAP device and a minimum target capacitance density at an applied voltage bias to be employed for the MIMCAP device. The MIMCAP device includes a bottom electrode and a dielectric layer disposed over the bottom electrode. The dielectric layer includes a stack of individual layers including the bottom high-K layer, the top high-K layer, and a lower-K layer sandwiched therebetween. At least one of the bottom high-K layer or the top high-K layer has the pre-determined thickness.

Integrated circuits including a MIMCAP device and methods of forming the same for long and controllable reliability lifetime

Methods for fabricating MIM capacitors with low VCC or decoupling and analog/RF capacitors on a single chip and the resulting devices are provided. Embodiments include forming: first and second metal lines in a substrate; a first electrode over, but insulated from, the first metal line; a first high-k dielectric layer on the first electrode, the first high-k dielectric layer having a coefficient &#x3b1;; a second electrode on the first high-k dielectric layer and over a portion of the first electrode; a second high-k dielectric layer on the second electrode, the second high-k dielectric layer having a coefficient &#x3b1;' opposite in polarity but substantially equal in magnitude to &#x3b1;; a third electrode on the second high-k dielectric layer over the entire first electrode; and a metal-filled via through a dielectric layer down to the first metal line, and a metal-filled via through the dielectric layer down to the second metal line.

Method of fabricating a MIM capacitor with minimal voltage coefficient and a decoupling MIM capacitor and analog/RF MIM capacitor on the same chip with high-K dielectrics

A range of lowest, low and regular threshold voltages are provided to three p-type devices and three n-type devices co-fabricated on a same substrate. For the p-type devices, the range is achieved for the lowest using an additional thick layer of a p-type work function metal in a gate structure and oxidizing it, the low Vt is achieved with the thick p-type work function metal alone, and the regular Vt is achieved with a thinner layer of the p-type work function metal. For the n-type devices, the lowest Vt is achieved by implanting tantalum nitride with arsenic, argon, silicon or germanium and not adding any of the additional p-type work function metal in the gate structure, the low Vt is achieved by not adding the additional p-type work function metal, and the regular Vt is achieved with a thinnest layer of the p-type work function metal.

Threshold voltage control for mixed-type non-planar semiconductor devices

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Mechanicville, NY, United States of America

Dina H Triyoso