Mellanox Technologies, Ltd.

Eth Zurich

Aristotle University of Thessaloniki

Dimitrios Tsiokos

Elad Mentovich

Paraskevas Bakopoulos

Dimitrios Kalavrouziotis

Juerg Leuthold

Claudia Hoessbacher

An optoelectronic device () includes thin film structures () disposed on a semiconductor substrate () and patterned to define components of an integrated drive circuit, which is configured to generate a drive signal. A back end of line (BEOL) stack () of alternating metal layers () and dielectric layers () is disposed over the thin film structures. The metal layers include a modulator layer (), which contains a plasmonic waveguide () and a plurality of electrodes (), which apply a modulation to surface plasmons polaritons (SPPs) propagating in the plasmonic waveguide in response to the drive signal. A plurality of interconnect layers are patterned to connect the thin film structures to the electrodes. An optical input coupler () is configured to couple light into the modulator layer, whereby the light is modulated by the modulation of the SPPs, and an optical output coupler () is configured to couple the modulated light out of the modulator layer.

Integrated plasmonic modulator

Growing community of inventors

Athens, Greece

Dimitrios Tsiokos