Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Dimitri Benke

Andres Fabian Lasagni

Teja Roch

Andrés Fabián Lasagni

The invention relates to a method for forming a structuring at surfaces of components using a laser beam. In the invention, a laser beam is directed onto a diffractive optical element. The diffractive optical element is configured such that the laser beam is split into at least two part beams and the part beams are directed at an angle &#x3b1; with respect to the optical axis of the laser beam onto at least one further optical element which is transparent for the laser radiation. The further optical element(s) has/have a first surface and a second surface which is inclined at an angle to the optical axis of the laser beam at which the beam direction of the part beams is changed by optical refraction. A focusing optical lens is arranged in the optical path of the part beams between the further optical element(s) and a component surface to be processed, and the part beams are focused such that they are incident onto the surface of the component at a common position at an angle of incidence &#x3b2; with respect to the optical axis of the laser beam. The distance dbetween the optical elements is changed to change the interference period.

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Dresden, Germany

Dimitri Benke