Asml Netherlands B.v.

Dimitra Sarri

Arie Jeffrey Den Boef

Jozef Petrus Henricus Benschop

Willem Jurrianus Venema

Ralph Brinkhof

Lukasz Jerzy Macht

Laurent Khuat Duy

A level sensor for measuring a position of a surface of a substrate includes a projection unit including an emitter for emitting a radiation beam towards the substrate and a projection grating including a measurement grating and an aperture, such that the radiation beam incident on the projection grating is divided into a measurement radiation beam and a capture radiation beam. The level sensor further includes a detection unit including a first and second measurement detector, a first and second capture detector, a detection grating, and a first and second optical unit. The detection grating includes a ruled grating with multiple rules, which direct radiation towards the first and second measurement detector via the first and second optical unit, and a capture element directing radiation towards the first and second capture detector via the first and second optical unit.

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Eindhoven, Netherlands

Dimitra Sarri