The University of Western Australia

Panorama Synergy Ltd

Dilusha Silva

John Marcel Dell

Lorenzo Faraone

Mariusz Martyniuk

Adrian John Keating

Gino Michael Putrino

Roger Jeffery

Jarek Antoszewski

Dhirendra Tripathi

The present disclosure relates to a method of fabricating a reflector, the reflector being at least partially reflective and at least partially transmissive for at least a wavelength of electromagnetic radiation; the method comprising:

Microelectromechanical systems (MEMS) and methods

A method of stimulating a MicroElectroMechanical Systems (MEMS) structure (e.g. a cantilever), and an optical sensor for use in such a method, using optical radiation pressure instead of electrostatic pressure, or the like. An optical pulse creates optical radiation pressure which stimulates movement of the MEMS structure and then movement of the MEMS structure may be measures. An interrogating light may be input after the optical pulse to measure movement of the MEMS structure. Advantageously, the same light source can be utilized to stimulate movement of the MEMS structure and to measure movement of the MEMS structure.

Stimulating an optical sensor using optical radiation pressure

An optical sensor including a MEMS structure, and a grating coupled resonating structure positioned adjacent to the MEMS structure, the grating coupled resonating structure comprising an interrogating grating coupler configured to direct light towards the MEMS structure. The interrogating grating coupler is two dimensional, and the interrogating grating coupler and the MEMS structure form an optical resonant cavity.

Optical cantilever based analysis

An apparatus for detecting a deflection of a beam, the apparatus comprising a beam having a first side and a second side; and a grating structure positioned adjacent the second side of the beam, the grating structure including an interrogating grating coupler configured to direct light towards the beam; wherein the beam and the interrogating grating coupler form a resonant cavity, and light input to the resonant cavity is modulated according to the deflection of the beam.

Growing community of inventors

Ballajura, Australia

Dilusha Silva