The Chinese University of Hong Kong

Dihan Chen

Shih-Chi Chen

Dapeng Zhang

Yina Chang

Erxuan Zhao

Hiu Hung Lee

Systems and methods for dicing a sample by a Bessel beam matrix are disclosed. The method for dicing a sample by a Bessel beam matrix may comprise generating a Bessel beam matrix including multiple Bessel beams arranged in a matrix form, according to a predetermined dicing layout of the sample; controlling a focus position of each Bessel beam in the generated Bessel beam matrix; and focusing simultaneously the Bessel beams of the Bessel beam matrix at the respective controlled focus positions within the sample for dicing.

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Hong Kong, China

Dihan Chen