Carl Zeiss Industrielle Messtechnik Gmbh

Dietrich Imkamp

Aksel Goehnermeier

Ferdinand Bader

A probing element for measuring at least one measurement object is provided. The probing element includes at least one first optical sensor configured to generate at least one first sensor signal depending on a fine shape of at least one surface of the measurement object, at least one second sensor configured to generate at least one second sensor signal depending on at least one of a coarse shape of the measurement object, and a distance to the measurement object. The at least one first optical sensor has a first measurement region and the at least one second sensor has a second measurement region. The at least one first optical sensor is at least partly integrated in the at least one second sensor to permit the first measurement region and the second measurement region to at least partly overlap.

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Schwaebisch Hall, Germany

Dietrich Imkamp