Duerr Systems, Gmbh

Roth & Rau Ag

Dürr Systems Ag

Dietmar Roth

Karl-Heinz Dittrich

Dietmar Wieland

Joachim Mai

Wolfgang Tobisch

Konrad Ortlieb

Bernd Rau

A method and device for ion beam processing of surfaces of a substrate positions the substrate to face an ion beam, and a new technologically-defined pattern of properties is established. According to the method, the current geometrical effect pattern of the ion beam on the surface of the substrate is adjusted depending on the known pattern of properties and the new technologically-defined pattern of properties, and depending upon the progress of the processing, by modifying the beam characteristic and/or by pulsing the ion beam. A device for carrying out the method includes a substrate support for holding at least one substrate, which can be moved along an Y-axis and an X-axis, and an ion beam source for generating an ion beam, which is perpendicular to the surface to be processed of the substrate in the Z-axis or which may be arranged in an axis, inclined in relation to the Z-axis. The distance between the ion beam source and the surface to be processed of the substrate may be fixed or variable.

Method and device for ion beam processing of surfaces

In order to provide a process for curing a coating, in particular a radiation-curable coating, on a work piece, which allows coatings even on difficult to access regions of a three-dimensional work piece to be cured in a simple manner, it is proposed that the work piece is disposed in a plasma generation area, and that in the plasma generation area a plasma is generated, by means of which the coating is at least partially cured.

Method and device for curing a coating

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Oberlungwitz, Germany

Dietmar Roth