Veb Elektromat Dresden

Centrotherm Elektrische Anlagen Gmbh & Co.

Centrotherm Clean Solutions Gmbh + Co. Kg

Dietmar Resch

Lutz Fabian

Rolf Hartung

Rainer Moller

Hans Autenrieth

Gunter Krodel

Hort Stelzer

Gunter Kroedel

The invention relates to an emission control system for removing environmentally harmful and/or toxic gases or vapors, comprising a reaction chamber which is connected to a plasma source, whereby plasma is formed in said reaction chamber by injecting excitation energy, and the reaction chamber and/or the plasma source has at least one inlet for the introduction of gases or vapors and one outlet for the gases or vapors which are treated in the plasma source and/or reaction chamber. According to the invention, the outlet of the reaction chamber is connected to a liquid jet pump which produces a low pressure in the reaction chamber and in the plasma source. The waste gases with the plasma or the waste gases which are treated by excited particles are jointly conducted along with the liquid which is circulated through the liquid jet pump, mixed therewith and discharged from said reaction chamber.

Emission control system

Apparatus for purifying waste gases

An apparatus for the gas-phase processing of disk-shaped workpieces serves for maintaining cleanliness of the processing space and the workpiece or for avoiding deposits on parts of the workpiece which are not inteded to be coated. In particular a second inner wall system, which is permeable to gas, is provided for the aforementioned purposes. This second inner wall system is associated with a flushing gas system.

Apparatus for the gas-phase processing of disk-shaped workpieces

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Dresden, Germany

Dietmar Resch