Carl Zeiss Microscopy Gmbh

Carl Zeiss Nts Gmbh

Dietmar Doenitz

Michael Steigerwald

Dirk Preikszas

Josef Biberger

Ralph Pulwey

Christian Hendrich

Jaroslaw Paluszynski

Momme Mommsen

Daniel Tobias

Andreas Eisele

Hans Mathèe

A method of processing of an object comprises scanning a particle beam across a surface of the object and detecting electrons emerging from the object due to the scanning; determining a height difference between the surface of the object and a predetermined surface for each of plural of locations on the surface of the object based on the detected electrons; determining a processing intensity for each of the plural locations on the surface of the object based on the determined height differences; and directing a particle beam to the plural locations based on the determined processing intensities, in order to remove material from or deposit material on the object at the plural locations.

Method of processing of an object

A particle optical apparatus has a particle source for generating at least one beam of charged particles, and a magnet arrangement having two pole plates, which are arranged spaced apart from one another, such that the at least one beam of charged particles in operation passes through the pole plates, wherein trenches are provided in the pole plates, in which trenches coil wires are arranged. The trenches, when viewed in a cross section transverse to an extension direction of the trenches, have a smaller width in a region of a surface of the pole plates, than in a region arranged at a distance from the surface.

Particle optical device with magnet assembly

Growing community of inventors

Aalen, Germany

Dietmar Doenitz