Globalfoundries Inc.

Dieter Lipp

Hans-Peter Moll

Tanya Nigam

Andreas Kerber

Stefan Richter

Marc Herden

The present disclosure provides a test structure which includes an SOI substrate having an active semiconductor layer, a buried insulating material layer, and a base substrate, wherein the active semiconductor layer is formed on the buried insulating material layer, which, in turn, is formed on the base substrate. The test structure further includes a contact which is formed on the active semiconductor layer and electrically coupled to the active semiconductor layer. Herein, the contact has a tip portion extending through the active semiconductor layer into the buried insulating material layer.

Test structures and method of forming an according test structure

A decoupling capacitor arrangement is provided for an integrated circuit. The apparatus includes a plurality of decoupling capacitor arrays electrically connected in parallel with one another. Each of the arrays includes a plurality of decoupling capacitors and a current limiting element. The decoupling capacitors of each array are electrically connected in parallel with one another. The current limiting element is connected in series with the plurality of decoupling capacitors.

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Görlitz, Germany

Dieter Lipp